2017
DOI: 10.14723/tmrsj.42.37
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Properties of Zinc-containing Diamond-like Carbon Films Prepared by Plasma Source Ion Implantation

Abstract: Zinc-containing diamond-like carbon films were prepared by a combination of magnetron sputtering of a zinc target and plasma source ion implantation and deposition in a hydrocarbon atmosphere. The effect of the preparation conditions on the film properties, such as surface morphology, film structure, Zn content, hardness and friction coefficient, was evaluated. A wide range of Zn contents can be realized, with films becoming rougher and softer with increasing Zn content. The films possess remarkable Zn-rich fe… Show more

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Cited by 3 publications
(1 citation statement)
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“…Zinc is biocompatible [26] and biodegradable [27] and thus suitable to be used in coatings of medical implants. Additionally, when preparing Zn-DLC films by plasma source ion implantation and deposition (PSII) [28], the zinc particles within the surface of the DLC film tend to have a diameter of several ten nm, even with average Zn contents as low as 9.6 at.% [29].…”
Section: Introductionmentioning
confidence: 99%
“…Zinc is biocompatible [26] and biodegradable [27] and thus suitable to be used in coatings of medical implants. Additionally, when preparing Zn-DLC films by plasma source ion implantation and deposition (PSII) [28], the zinc particles within the surface of the DLC film tend to have a diameter of several ten nm, even with average Zn contents as low as 9.6 at.% [29].…”
Section: Introductionmentioning
confidence: 99%