Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

Flege, Stefan; Hatada, Ruriko; Hanauer, Andreas; Ensinger, Wolfgang; Morimura, Takao; Baba, Koumei

doi:10.1155/2017/9082164

Cited by 15 publications

(3 citation statements)

References 50 publications

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“…A granular surface is again observed and the width of these features is slightly larger (40 nm ± 14 nm) compared to the corresponding a-C thin film (17.5 nm ± 5 nm). Several studies have reported that metal doping generally results in a change in grain size [21,49,50], as well as film density [51], where the latter depends on how the incorporated metal diffuses.…”

Section: Electrical Propertiesmentioning

confidence: 99%

Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper

et al. 2020

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Amorphous carbon-based coatings deposited on copper substrates by magnetron sputtering at different target-to-substrate distances were investigated. Films deposited at short distances as 2 cm presented the best results in terms of morphology, density, and resistivity. Ultraviolet near-infrared range spectrometry measurements determined total reflectance and ellipsometry, extinction coefficient, refraction index, and pseudo bandgap. Amorphous carbon films of 150 nm deposited at 2 cm reduced the total reflectance by up to 60 ± 5% in the near-infra-red range when compared to pure copper films. The addition of Fe*boosts the absorption of the coating reducing the total reflectance by up to 70 ± 5% in near-infrared. (Fe*: deposited from stainless-steel target used in direct-current magnetron sputtering). Also, it reduces the electrical resistivity by a factor of 100 compared to that of pure amorphous carbon films. The reduction in total reflectance induced by the presence of the amorphous carbon-based films on copper depends, as expected, on light penetration depth and the absorption coefficient.

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Section: Electrical Propertiesmentioning

confidence: 99%

Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper

et al. 2020

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“…It is known that depositing DLC films directly onto steel surfaces provides a poor-quality film because of high residual stress at their interfaces [2,4]. Therefore, an interlayer/multilayer deposition has been proposed to obtain high-quality DLC film [5,6]. Here, the Ti film is one of the most effective interlayers with good capability and suitability for DLC coating [7,8].…”

Section: Introductionmentioning

confidence: 99%

Structural, mechanical properties and corrosion performance of multilayer Ti doped-DLC/Ti films deposited on low-carbon steel

Rittihong

Tunmee

Supruangnet

et al. 2023

J. Phys.: Conf. Ser.

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In this work, the successful preparation of the multilayer Titanium doped diamond-like carbon/Ti (Ti-DLC/Ti) films deposited on low-carbon steel (CS) using hybrid magnetron sputtering (MS) and plasma-enhanced chemical vapor deposition methods has been reported. The Ti and Ti-DLC films were alternately deposited on the CS substrate of up to 4 stacks with an average deposition rate of 16.4±1.7 nm/min and 15.1±1.5 nm/min, respectively, yielding a total thickness of up to 1703 nm. Raman spectroscopic analysis revealed a gradual increase in the I D/I G ratio with an increase in Ti layer numbers. Both XPS and NEXAFS results indicate an increase in the C-sp 2 content by increasing the number of Ti layer, which may influence on the hardness reduction. The adhesive properties were found to be improved by adding the number of Ti interlayers between the CS substrate. Moreover, the thicker multilayer films exhibit progressive homogeneity resulting in better corrosion resistance.

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“…DLC describes a broad term referring to several forms of amorphous carbon (hydrogenated [a‐C:H] and hydrogen‐free [a‐C]) and can be applied in biosensors, electronics, protective coatings for mechanical and medical components, and so on . Characteristic disadvantages of DLC (poor thermal stability and high internal stresses) can be overcome by introducing metal nanoparticles to the film . By combining the best properties of matrix and filler (in our case, DLC and Ag nanoparticles, respectively), the resulting nanocomposite films have promising applications in multidisciplinary fields of mechanics, optics and photonics, electronics, and medicine …”

Section: Introductionmentioning

confidence: 99%

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

et al. 2019

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Patterning of nanocomposites by conventional lithography processes is problematic due to the different physical properties of matrix and filler. Direct laser interference patterning (DLIP) promises rapid micromachining of virtually any material with subwavelength resolution. A control of intense laser light modifies the filler particle size distribution in nanocomposite films. Herein, DLIP of periodic patterns with half‐pitch <1 μm in reactive magnetron‐sputtered hydrogenated amorphous diamond‐like carbon nanocomposite thin films with embedded silver nanoparticles (DLC:Ag) is demonstrated. Periodic patterns of regularly repeating areas with modified size distributions of silver nanoparticles are obtained by a variation of fluences and number of pulses of 515 nm wavelength femtosecond laser. Depending on the silver content in nanocomposite films, nanoparticle size distributions are either bimodal (for 14.1 at% Ag containing films) or unimodal (7.9 at%) with effective average diameters shifting from 13 to 69 nm, depending on the laser processing parameters. The importance of localized surface plasmon absorption and localized field enhancement at the DLC–Ag interface for lowering the ablation threshold of DLC:Ag nanocomposites below 6 mJ cm−2 at 1000 pulses is demonstrated. This is at least four times lower than the threshold for pure DLC obtained using the same DLIP setup.

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Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties

Cited by 15 publications

References 50 publications

Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper

Low resistivity amorphous carbon-based thin films employed as anti-reflective coatings on copper

Structural, mechanical properties and corrosion performance of multilayer Ti doped-DLC/Ti films deposited on low-carbon steel

Tailoring of Silver Nanoparticle Size Distributions in Hydrogenated Amorphous Diamond‐Like Carbon Nanocomposite Thin Films by Direct Femtosecond Laser Interference Patterning

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