2004
DOI: 10.1016/s0955-2219(03)00382-0
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Preparation and evaluation of LaNiO3 thin film electrode with chemical solution deposition

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Cited by 75 publications
(39 citation statements)
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“…The electrical resistivity of the LNO thin film on Si (1 0 0) substrate is 1.4 Â 10 À3 O cm, which is close to the reported values [13,17,18]. Compared with the LNO electrode on Si (1 0 0) substrate, the electric resistivity of hybrid electrodes LNO/Pt is much smaller (2.0 Â 10 À5 O cm).…”
Section: Textured Lanio 3 Filmssupporting
confidence: 84%
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“…The electrical resistivity of the LNO thin film on Si (1 0 0) substrate is 1.4 Â 10 À3 O cm, which is close to the reported values [13,17,18]. Compared with the LNO electrode on Si (1 0 0) substrate, the electric resistivity of hybrid electrodes LNO/Pt is much smaller (2.0 Â 10 À5 O cm).…”
Section: Textured Lanio 3 Filmssupporting
confidence: 84%
“…LNO thin films were deposited on Si (1 0 0) and Pt-coated Si substrates with reference to a reported method [13]. BTO thin films were grown on the obtained LNO buffer layer by a chemical solution deposition (CSD) process, in which barium metal, Ti-isopropoxide were used as starting materials, 2-methoxyethonal was used as solvent.…”
Section: Methodsmentioning
confidence: 99%
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“…LaNiO3 thin films as bottom electrode were deposited on Si substrates with reference to a reported method [24]. (1 − x)BFO-xNBT thin films with x = 0.05, 0.10, and 0.15 were prepared on Si substrates by a sol-gel process [25,26] acid was added to promote alcoholysis.…”
Section: Methodsmentioning
confidence: 99%
“…In our previous work, 9 LNO thin film with relatively good conductivity and preferred orientation has been prepared by the CSD, and the PZT/LNO capacitor with ferroelectric property was also deposited by a CSD. However, the CSD-derived PZT/LNO capacitor shows inferior electrical properties because of the relatively high dielectric loss and low conductivity.…”
Section: Introductionmentioning
confidence: 99%