Preparation and characterization of titanium dioxide thin film for field-effect transistor biosensor application

Abstract

This paper presents the method of preparation and characterization of titanium dioxide (TiO2) thin film before deposition on the channel of field-effect transistor (FET) biosensor devices. The TiO2 is prepared using sol-gel technique and is deposited onto the silicon dioxide (SiO2) surface using spin coater. Three different numbers of coating layers (5, 7, and 9 coating layer) of TiO2 are deposited on three SiO2 layer grown on top of Si substrate for investigation. The samples are baked and annealed before being characterized electrically and morphologically. All these results give a helpful indication for the deposition process of the TiO2 thin film as the FET biosensor device on the silicon-on-insulator (SOI) wafer.

Nanostructured Titanium Dioxide Surfaces for Electrochemical Biosensing

“…In electrochemical biosensors, the use of a thin film of TiO 2 in the anatase phase is desirable because of its insolubility against moderate acid and alkali solutions. This property makes the TiO 2 anatase phase especially suitable for the development of pH sensors [21]. Moreover, although many applications are performed in physiological pH, the previous step of functionalization with different biomolecules may involve more restrictive conditions under acidic or basic pH.…”

Removal of Surface Oxygen Vacancies Increases Conductance Through TiO2 Thin Films for Perovskite Solar Cells

“…Thin films of anatase titanium dioxide (TiO 2 ) are applied in electronics ranging from thin film transistors, and anode materials for lithium-ion batteries, to memristors and photoanodes for water oxidation. − For all these electronic devices, a careful adjustment of oxygen vacancies and a reproducible electrical resistance of TiO 2 play a major role . The adjustment of oxygen vacancies is particularly important for the application of TiO 2 thin films as electron transport layers (ETL) in perovskite solar cells (PSC).…”