Piezoelectric resonant micromirror with high frequency and large deflection applying mechanical leverage amplification

Abstract

This paper presents design, fabrication and measurements for single-axis piezoelectric MEMS micromirrors with 1 mm2 apertures. These micromirrors, which feature thin-film PZT actuators and mechanical leverage amplification, are dedicated for laser projection and meet the requirements of high resonant frequency and large deflection angles. To identify the optimal micromirror geometries a parametric study by means of FEM simulations and analytic modeling has been performed. Characterization, related to the material qualities of PZT and the mechanical performance of the micromirrors, have verified the reliability of the process, the robustness and the performance of the fabricated prototypes. According to the measurements the fabricated micromirrors feature high Q-factor about 1570. The micromirror reaches the theta(ind opt)·D product of 42.5 °·mm at 32 kHz driven by a low voltage of 7 V. Furthermore, new designs with larger apertures and deflections are currently being developed

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

“…Fig. 8 (b) shows also the used construction with double torsion bars improves the leverage amplification, so that the value of θ opt · D · f / V of the presented mirror 1 is higher than the earlier reported device in [6].…”

“…On the other hand a comparison between 1D micromirrors driven by the four different principles shows that PZT micromirrors have considerable advantages for achieving a higher displacement at a lower driving voltage than the other three driving principles [6]. Regarding these factors it is motivating to investigate an approach to realize a 2D laser display by combining two single axis PZT micromirrors.…”

High Frequency 1D Piezoelectric Resonant Microscanners with Large Displacements

“…For the presented mirrors the concept of using leverage amplification is applied, which has been reported in [2]. The microscanners possess a mirror in the center, an outer actuator frame consisting of two PZT bimorph actuators (I and II) as well as connecting bars and torsion bars (Fig.…”

“…In accordance with the development of the processing technology PZT actuated micromirrors are showing increasingly attractive performance [1]. Researches on different 1D PZT driven micromirrors have been performed and reported in [2]. Based on the earlier results, two designs have been developed and fabricated.…”

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

“…Contrary to the DLP technology in which majority of the tasks for image production are realized optically, electronic design plays a more important role for scanning-type projectors. As demonstrated in prior studies, micro-scanning mirrors may be driven by electrostatic [5][6][7][8][9][10][11][12][13][14], electromagnetic [15][16][17][18] or piezoelectric [19][20][21][22][23] mechanisms. Each approach has its own advantages and disadvantages.…”