An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Hung, Andrew C.-L.; Lai, Harrison Y.-H.; Lin, Tsung Yi; Fu, Sheng-Gang; Lu, Michael S.-C.

doi:10.1016/j.sna.2014.10.008

Cited by 83 publications

(40 citation statements)

References 35 publications

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“…Electrostatic mechanisms, on the other hand, use the attractive (or repelling) force between two charged plates or surfaces, which requires very little current, and therefore, consume low power. When they are fabricated in the micrometer scale, they can sustain very high electric fields since the gaps between the charged surfaces can be smaller than the mean free path of particles in air at room temperature (∼ 6 µm) [16]. Similarly, piezoelectric actuation mechanisms require very small currents, and are capable of providing high-speed actuation [17].…”

mentioning

confidence: 99%

VO₂-Based MEMS Mirrors

Torres

Wang

Zhang

et al. 2016

J. Microelectromech. Syst.

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This paper reports the integration of vanadium dioxide (VO 2 ) thin films in a microelectromechanical systems (MEMS) mirror device, where the actuation is mainly due to the solid-solid phase transition of VO 2 . The fabrication process described in this paper provides the details that will enable the integration of VO 2 thin films at any step during the fabrication of rather complex MEMS devices. The present VO 2 -based MEMS mirror device is operated electro-thermally through integrated resistive heaters, and its behavior is characterized across the phase transition of VO 2 , which occurs at a temperature of ∼68°C and spans about 10°C. The maximum vertical displacement of the mirror platform is 75 µm and it occurs for an input voltage of 1.1 V. This translates to an average power consumption of 6.5 mW per mirror actuator and a total power consumption of 26.1 mW for the entire device. The studies included in this paper are key for future device improvements and further development of MEMS mirror actuation technology, which could include the use of the hysteresis of VO 2 for programming tilting angles in MEMS mirrors.[ 2016-0016]Index Terms-Microelectromechanical systems (MEMS)-mirrors, vanadium dioxide, phase-change materials.

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mentioning

confidence: 99%

VO₂-Based MEMS Mirrors

Torres

Wang

Zhang

et al. 2016

J. Microelectromech. Syst.

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“…ES and PE use electrostatic fields for actuation—the ES commonly uses repelling/attracting forces between two plates to move the mirror platform from a resting state [1], while the PE method uses piezoelectric materials such as lead zirconate titanate (PZT) [2], where small unorganized dipoles generate material expansion and contraction upon an applied electric field. In both cases (ES and PE), mechanical forces are generated by an electric potential signal of relative large amplitude (for example: 115 V and 40 V for ES and PE, respectively), but the total power consumed by these devices is low due to the low current consumption [3,4]. The EM mechanism generates movement as the result of the force between interacting magnetic fields (Lorentz force).…”

Section: Introductionmentioning

confidence: 99%

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

et al. 2017

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Given the multiple applications for micro-electro-mechanical system (MEMS) mirror devices, most of the research efforts are focused on improving device performance in terms of tilting angles, speed, and their integration into larger arrays or systems. The modeling of these devices is crucial for enabling a platform, in particular, by allowing for the future control of such devices. In this paper, we present the modeling of a MEMS mirror structure with four actuators driven by the phase-change of a thin film. The complexity of the device structure and the nonlinear behavior of the actuation mechanism allow for a comprehensive study that encompasses simpler electrothermal designs, thus presenting a general approach that can be adapted to most MEMS mirror designs based on this operation principle. The MEMS mirrors presented in this work are actuated by Joule heating and tested using optical techniques. Mechanical and thermal models including both pitch and roll displacements are developed by combining theoretical analysis (using both numerical and analytical tools) with experimental data and subsequently verifying with quasi-static and dynamic experiments.

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“…It is connected to the outer frame through flexures. The outer frame is 90° rotated with respect to the inner frame and can tilt about its longitudinal axis which is perpendicular to the inner frame tilting axis [9][10][11][12]. These types of structures are usually of larger size compared to gimbal-less structures, and consume larger power in operation.…”

Section: Introductionmentioning

confidence: 99%

Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

Afsharipour

Park

Shafai

2017

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017

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Abstract:A versatile MEMS micro-mirror for optical platforms is presented, that operates using Lorentz force for actuation, resulting in low voltage operation. While maintaining below 20 mA drive current, this mirror has a tilting angle of over 50° and 20° around two diagonal axes and a linear motion of 1.5 mm in vertical axis. Compared to other works, it has larger angle of rotation and additional out of plane linear motion. The temperature rise on the mirror is kept bellow 25 °C to avoid thermal expansion of the support flexures and curvature of the mirror.

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An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Cited by 83 publications

References 35 publications

VO₂-Based MEMS Mirrors

VO₂-Based MEMS Mirrors

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

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An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Cited by 83 publications

References 35 publications

VO2-Based MEMS Mirrors

VO2-Based MEMS Mirrors

Modeling of MEMS Mirrors Actuated by Phase-Change Mechanism

Large Tilt Angle Lorentz Force Actuated Micro-Mirror with 3 DOF for Optical Applications

Contact Info

Product

Resources

About

VO₂-Based MEMS Mirrors

VO₂-Based MEMS Mirrors