Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

Gu-Stoppel, Shanshan; Janes, Joachim; Quenzer, Hans-Joachim; Hofmann, Ulrich; Benecke, W.

doi:10.1117/12.2036565

Cited by 8 publications

(7 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Prior experiments with piezoelectrically actuators for micro mirrors demonstrated their ability for highly effective resonant driving even when operated under atmospheric conditions in air [6]. However up to now vertical operating piston actuators have not been combined with integrated piezoelectrically actuators.…”

Section: Devicementioning

confidence: 98%

Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements

et al. 2015

Self Cite

View full text Add to dashboard Cite

The design and manufacturing of a piezoelectrically driven translatory MEMS actuator is presented, which features a 7 mm aperture and four thin-film PZT actuators achieving large displacements. The actuator performs piston mode oscillation in resonance which can serve for Fourier Transform Infrared Spectroscopy (FTIR). Thereby vertical displacements in piston mode of up to ± 800 µm at 163 Hz and 25 V driving sinusoidal voltage has been achieved under ambient conditions. Due to the low frequencies and the low driving voltages only low power consumption is required. The effect of residual gas friction and internal friction on the piezo-driven MEMS actuator is analyzed by measuring Qvalues associated with the piston mode. Laser Doppler Vibrometry (LDV) was also used to detect and analyses the parasitic effects especially tilting which superimposes the vertical movement of the mirror. The deviation from the pure vertical piston mode was found to 1.3 µm along the x and 3 µm in the y-axis.

show abstract

Section: Devicementioning

confidence: 98%

Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements

et al. 2015

Self Cite

View full text Add to dashboard Cite

show abstract

“…The in previous work [6] and [7] introduced micromirrors use thin-film PZT as the driving material converting the electrical signal into mechanical energy. Simultaneously PZT can also deliver electrical signals according to the mechanical motion based on the direct piezoelectric effect.…”

Section: Direct Piezoelectric Effectmentioning

confidence: 99%

A study of integrated position sensors for PZT resonant micromirrors

et al. 2015

Self Cite

View full text Add to dashboard Cite

PZT driven resonant micromirrors offer advantages of large scan angles and decreasing power consumption due to the benefits of resonant driving and high torque delivered by PZT actuators. Therefore they are entering into different application fields recently, for example as laser projection or head-up displays. For many uses position sensing of the micromirrors is necessary to set up closed loop controls. Thus, the development of integrated position sensors is aimed in this work. Investigation and evaluation of different position sensing principles have been performed. In previous works 1D and 2D PZT driven resonant micromirrors have been presented, which feature various spring suspensions and thinfilm PZT actuators as drivers. Due to the considerably different motion modes and resonant frequencies, which vary from 100 Hz up to 64 kHz, various position detection methods have been investigated. This work presents primarily fabrication and characterization results of the position sensors based on the direct piezoelectric effect, which will be compared to the position sensors using metallic strain gauge realized by the same fabrication technology. Analyses of the sensitivity, linearity and dynamic behavior of the sensors have been performed, by means of comparing the sensor signals and the micromirror position signals measured by a Position-Sensitive-Device. Advantages and drawbacks of the sensors are discussed and methods for eliminating the drawbacks are proposed

show abstract

“…However, for the actuation high driving voltage is required and the comb finger capacitors cause high lateral air damping [ 7 ], which demands vacuum packaging to improve the mechanical efficiency [ 6 ]. In contrast, piezoelectric materials [ 8 , 9 , 10 ], for example lead zirconate titanate (PZT), deliver high driving force at low driving voltage, so that piezoelectrically driven micromirrors achieve large deflection even operated under ambient conditions. Therefore, together with the improvement of processing technology of piezoelectric materials, piezoelectrically driven micromirrors are showing obvious advantages.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, despite great integration and sophistication, biaxial micromirrors have yet vulnerabilities. By comparison, the approach of applying two single-axial micromirrors to realize biaxial scanning shows significant advantages of high flexibility and no crosstalk of the two axial motions, which simplifies the controlling [ 10 ]. Thus, a setup combining two single axial micromirrors for biaxial scanning and the results will be presented in this work.…”

Section: Introductionmentioning

confidence: 99%

PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

et al. 2017

View full text Add to dashboard Cite

This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage amplification has been applied for the micromirrors in this work to reach large displacements consuming low power. Additionally, fracture strength and failure behavior of poly-Si, which is the basic material of the micromirrors, have been studied to optimize the designs and prevent the device from breaking due to high mechanical stress. Since comparing to using biaxial micromirror, realization of biaxial scanning using two independent single-axial micromirrors shows considerable advantages, a setup combining two single-axial micromirrors for biaxial scanning and the results will also be presented in this work. Moreover, integrated piezoelectric position sensors are implemented within the micromirrors, based on which closed-loop control has been developed and studied.

show abstract

Two-dimensional scanning using two single-axis low-voltage PZT resonant micromirrors

Cited by 8 publications

References 7 publications

Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements

Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements

A study of integrated position sensors for PZT resonant micromirrors

PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

Contact Info

Product

Resources

About