“…In this article, we introduce a new batch-fabrication method of nanogap tunneling junctions and we perform an exhaustive characterization of the uniformity of the spacer layer, inspect tunneling current characteristics, and determine the potential barrier of the thin spacer layer as well as the maximum operating voltage for the device. Molecular devices based on this construction method have been previously used as tunneling chemiresistors for bio sensing [15,16,17,18] and are potential candidates for low-power consumption gas sensing devices [19,20,21,22]. The nanogap electrodes are chemically functionalized by coating them with a self-assemble-monolayer (SAM) of thiol molecules.…”