2019
DOI: 10.3390/nano9050727
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Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

Abstract: This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer layer of sputtered α-Si and Atomic Layer Deposited (ALD) SiO2. A ~10 nm wide air-gap is formed along the sidewall by a controlled dry etch of the spacer. The thickness of the spacer layer can be tuned by adjusting the n… Show more

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Cited by 18 publications
(13 citation statements)
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“…Theoretically, R tunnel is known to increase drastically with the gap distance36 and no tunneling takes place when the gap distance of Au atoms is larger than 0.60 nm 37. Experimentally, the tunneling distance is larger than the theoretical distance because the tunneling current varies with the bias condition and the detailed surface roughness of the contact area 38. There have been several experimental reports about R tunnel .…”
Section: Resultsmentioning
confidence: 99%
“…Theoretically, R tunnel is known to increase drastically with the gap distance36 and no tunneling takes place when the gap distance of Au atoms is larger than 0.60 nm 37. Experimentally, the tunneling distance is larger than the theoretical distance because the tunneling current varies with the bias condition and the detailed surface roughness of the contact area 38. There have been several experimental reports about R tunnel .…”
Section: Resultsmentioning
confidence: 99%
“…Garulli et al described a smart temperature-sensor design based on the architecture of CMOS 65 nm technology for use in the IoT network [ 197 ]. Kim et al have recently developed a novel sensing technique for highly sensitive biosensing based on the quantum-tunneling effect using nanogap break-junctions [ 198 , 199 , 200 , 201 , 202 , 203 , 204 , 205 , 206 ]. Furthermore, Mastrangelo et al have also been responsible for developing zero-power and highly sensitive polymeric sensors for VOC detection [ 207 , 208 , 209 , 210 , 211 , 212 , 213 ].…”
Section: Nano-biosensors For Cancer Detection and Future Prospectimentioning
confidence: 99%
“…Details of the device fabrication method have been extensively discussed in our previous article 26 . Figure a shows the simplified fabrication process flow.…”
Section: Device Design and Fabricationmentioning
confidence: 99%