Photo-MOCVD of Cu thin films using Cu(hfa)(MHY) as precursor

Vidal, S.; Maury, F.; Gleizes, Alain; Chen, T.-Y.; Doppelt, P.

doi:10.1051/jp4:19998100

Cited by 5 publications

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“…Implications for the Use of (hfac)Cu (MHY) as a Precursor for Copper CVD. (hfac)Cu(MHY) is a stable volatile molecule that has been studied and used as a precursor for Cu CVD. − But, under our experimental conditions, formation of the dinuclear species occurs. The yield of the reaction is 62%, meaning that just 38% of the mononuclear species is vaporized.…”

Section: Results and Discussionmentioning

confidence: 95%

“…In general, CVD copper processes have utilized (hfac)Cu(VTMS) (where VTMS = vinyltrimethylsilane and hfac = hexafluoroacetylacetonate, Cupra-select), which is commercially available, but is a thermally labile material. (hfac)Cu(MHY) (MHY = 2-methyl-1-hexen-3-yne), which has also been reported to be a powerful precursor for Cu CVD, has been the object of patents and studies by our group − and others. , …”

Section: Introductionmentioning

confidence: 99%

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Formation Study and X-ray Structures of Dinuclear β-Diketonate Copper(I) Complexes with Conjugated Ene−Yne Lewis Base. Implications for the Use of (hfac)Cu(MHY) as a Precursor for Copper CVD

Vaissermann

Doppelt

2001

Inorg. Chem.

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Dinuclear [(hfac)Cu](2)(MHY) and [(hfac)Cu](2)(HY) species, where hfac = hexafluoroacetylacetonate, MHY = 2-methyl-1-hexen-3-yne, and HY = hex-3-yn-1-ene), are formed during copper chemical vapor deposition experiments when a bubbler containing the corresponding mononuclear species is used. These compounds and the so far unknown (hfac)Cu(HY) have been characterized by (1)H and (13)C NMR and IR spectroscopy and the two dinuclear species by X-ray crystallography and elemental analysis. As expected, in the structure of the dinuclear species, two roughly perpendicular Cu(hfac) moieties are bound to a single ene-yne: one to the C[triple bond]C, the other to the conjuguated double bond. Weak intra- and intermolecular Cu...Cu interactions have been detected in the solid. [(hfac)Cu](2)(HY) is more stable and more easily formed than [(hfac)Cu](2)(MHY) because of the hindrance character of the additional methyl groups. The formation of the dinuclear species from the mononuclear species is reversible as it has been demonstrated by (1)H NMR. The mononuclear species can be recovered from the dinuclear species when free ene-yne base is added. Crystallographic data for [(hfac)Cu](2)(MHY): C(17)H(12)O(4)F(12)Cu(2), triclinic, P1 (No. 2), Z = 4; at 298 K, a = 11.112(3) A, b = 13.472(4) A, c = 15.747(3) A, alpha = 94.95(2) degrees, beta = 98.15(2) degrees, gamma = 100.27(2) degrees; Crystallographic data for [(hfac)Cu](2)(HY): C(16)H(10)O(4)F(12)Cu(2), orthorhombic, Cc2a (No. 41, Aba2), Z = 8; at 230 K, a = 12.280(3) A, b = 13.531(3) A, c = 25.461(5) A.

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Section: Results and Discussionmentioning

confidence: 95%

Section: Introductionmentioning

confidence: 99%

Formation Study and X-ray Structures of Dinuclear β-Diketonate Copper(I) Complexes with Conjugated Ene−Yne Lewis Base. Implications for the Use of (hfac)Cu(MHY) as a Precursor for Copper CVD

Vaissermann

Doppelt

2001

Inorg. Chem.

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“…Some of these are illustrated in Figure 31. 153,155 (hfac)Cu(HFB) cannot be isolated because the C-C triple bond is deactivated to the extent that it can no longer stabilize the Cu(I) β-diketonate complex. 111 (hfac)Cu(MHY) is another promising liquid precursor candidate for low-temperature CVD, in particular in photo-MOCVD.…”

Section: Cu(i) Precursorsmentioning

confidence: 99%

“…111 (hfac)Cu(MHY) is another promising liquid precursor candidate for low-temperature CVD, in particular in photo-MOCVD. 155 Miscellaneous Lewis Base Ligands. Three other types of (hfac)CuL n precursor are worth mentioning, those with L ) trialkyl phosphenes, carbonyl, and ammonia; some are shown in Figure 32.…”

Section: Cu(i) Precursorsmentioning

confidence: 99%