Performance of a Micro-Optical Wall Shear Stress Sensor Based on Whispering Gallery Mode Resonators

Ioppolo, Tindaro; Ayaz, Ulas; Otugen, M. V.

doi:10.2514/6.2009-314

Cited by 3 publications

(4 citation statements)

References 10 publications

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“…From [6], it is demonstrated that the Nussel number Nu can be written as: Nu = 0.42Pr 0.2 + 0.57Pr 0.33 Re 0.5 (7) where Pr is the Prandtl number and Re is the Reynolds number. Using Equation (7) in Equation ( 6), the linear dependence between the resistance of the wire and its temperature can be written as:…”

Section: Theoretical Analysis Of the Cta Circuitmentioning

confidence: 99%

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RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

2020

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In this paper, a Micro-Electro-Mechanical Systems (MEMS) calorimetric sensor with its measurement electronics is designed, fabricated, and tested. The idea is to apply a configurable voltage to the sensitive resistor and measure the current flowing through the heating resistor using a current mirror controlled by an analog feedback loop. In order to cancel the offset and errors of the amplifier, the constant temperature anemometer (CTA) circuit is periodically calibrated. This technique improves the accuracy of the measurement and allows high sensitivity and high bandwidth frequency. The CTA circuit is implemented in a CMOS FD-SOI 28 nm technology. The supply voltage is 1.2 V while the core area is 0.266 mm2. Experimental results demonstrate the feasibility of the MEMS calorimetric sensor for measuring airflow rate. The developed MEMS calorimetric sensor shows a maximum normalized sensitivity of 117 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0–26 m/s. The high sensitivity and wide dynamic range achieved by our MEMS flow sensor enable its deployment as a promising sensing node for direct wall shear stress measurement applications.

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Section: Theoretical Analysis Of the Cta Circuitmentioning

confidence: 99%

“…For example, micro-fences using a cantilever structure and piezoresistors are presented in [5]. The exploitation of optical resonances such as whispering gallery modes of dielectric microspheres is proposed in [6]. The deflection of micro-pillars is presented in [7].…”

Section: Introductionmentioning

confidence: 99%

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

2020

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“…For avoiding these drawback indirect wall shear stress measurements were developed with various methods. For example, micro-fences using a cantilever structure and piezoresistors are presented in [10]; the exploitation of optical resonances such as whispering gallery modes of dielectric microspheres is proposed in [11] (for which the optical resonance shifts with radial deformations of the spheres due to the shear stress); the deflection of micro-pillars is presented in [12] and thermal-based sensors are presented in the next paragraphs of the present paper. The physical principle used in these latter consists in taking advantage of the convective heat transfer between an electrically heated resistor and a surrounding cooler fluid [6].…”

Section: Figure 1: (A) Schematic Of a Flow Separation On An Airfoil Lmentioning

confidence: 99%

High temperature gradient calorimetric wall shear stress micro-sensor for flow separation detection

Ghouila-Houri

Gallas

Garnier

et al. 2017

Sensors and Actuators A: Physical

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The paper describes and discusses the design and testing of an efficient and high-sensitive calorimetric thermal sensor to measure simultaneously the magnitude and the direction of wall shear stress in aerodynamic flows. The main technical application targeted is the back flow and the flow separation detection for active flow control. The measurement principle is based on the flow-induced forced heat convection transfer on a heater element. The sensor is micro-structured with three parallel substrate-free wires presenting a high aspect ratio and supported by periodic perpendicular SiO2 micro-bridges ensuring a mechanical toughness and a thermal insulation relatively to the bulk substrate with high thermal inertia. The central wire is made of a multilayer structure (Au/TiSiO2/Ni/Pt/Ni/Pt/Ni/SiO2) and is composed of a heater element (Au/Ti) and a thermistor (Ni/Pt/Ni/Pt/Ni) enabling to measure the heater temperature. The upstream and downstream wires are thermistors enabling to operate in the calorimetric mode. This design provides a high temperature gradient and a homogeneous temperature distribution along the wires. The sensor operates in both constant current mode and constant temperature mode, with a feedback on current enabled by uncoupling heating and measure. Welded on a flexible printed circuit, the sensor was flush mounted on the wall of a turbulent boundary layer wind tunnel. The experiments, conducted in both attached and separated flow configurations, demonstrate the sensor sensitivity to the wall shear stress up to 2.4 Pa and the ability of the sensor to perform flow direction sensing for back-flow detection in a separated flow configuration.

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“…2 Although these techniques have shown great promise, issues with sensor durability, high fabrication costs, and susceptibility to environmental conditions and contamination have hindered their development. Other direct measurement techniques have recently shown promise including whispering gallery mode sensors 3,4 and fiber Bragg gratings. 5 Several indirect techniques to measure shear stress have also been developed with two of the most promising being laser Doppler anemometry and small scale pressure drag forces.…”

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confidence: 99%

Shear Stress Sensing with Elastic Microfence Structures

Cisotto

Palmieri

Saini

et al. 2015

31st AIAA Aerodynamic Measurement Technology and Ground Testing Conference

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In this work, elastic microfences were generated for the purpose of measuring shear forces acting on a wind tunnel model. The microfences were fabricated in a two part process involving laser ablation patterning to generate a template in a polymer film followed by soft lithography with a two-part silicone. Incorporation of a fluorescent dye was demonstrated as a method to enhance contrast between the sensing elements and the substrate. Sensing elements consisted of multiple microfences prepared at different orientations to enable determination of both shear force and directionality. Microfence arrays were integrated into an optical microscope with sub-micrometer resolution. Initial experiments were conducted on a flat plate wind tunnel model. Both image stabilization algorithms and digital image correlation were utilized to determine the amount of fence deflection as a result of airflow. Initial free jet experiments indicated that the microfences could be readily displaced and this displacement was recorded through the microscope.

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Performance of a Micro-Optical Wall Shear Stress Sensor Based on Whispering Gallery Mode Resonators

Cited by 3 publications

References 10 publications

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

RETRACTED: Constant Temperature Anemometer with Self-Calibration Closed Loop Circuit

High temperature gradient calorimetric wall shear stress micro-sensor for flow separation detection

Shear Stress Sensing with Elastic Microfence Structures

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