Performance characteristics of a force sensor concept based on the morphology dependent resonance ͑MDR͒ shifts of micro-optical resonators have been investigated. Previous experimental studies have indicated that microsphere sensors with diameters ranging between 30 and 950 m may have force resolutions reaching 10 −5 N ͓T. Ioppolo et al., Appl. Opt. 47, 3009 ͑2008͔͒. In the present, we carry out a systematic analysis and experiments to investigate the sensitivity, resolution, and bandwidth limits of MDR-based force sensors. Expressions for MDR shifts due to applied force in the polar direction are obtained for microspheres of various dielectric materials in the diameter range of 300-950 m. The analyses are compared with experimental results for polymethylmethacrylate and polydimethylsyloxane ͑PDMS͒ microsphere sensors. The results show that the strain effect on MDR shifts is dominant over that of mechanical stress. It also indicates that force sensitivities of the order of a 1 pN are feasible using hollow PDMS spheres. The sensor bandwidths range between 1 kHz and 1 MHz, depending on the sphere material.

In this paper we investigate the electrostriction effect on the whispering gallery modes (WGM) of polymeric microspheres and the feasibility of a WGM-based microsensor for electric field measurement. The electrostriction is the elastic deformation (strain) of a dielectric material under the force exerted by an electrostatic field. The deformation is accompanied by mechanical stress which perturbs the refractive index distribution in the sphere. Both strain and stress induce a shift in the WGM of the microsphere. In the present, we develop analytical expressions for the WGM shift due to electrostriction for solid and thin-walled hollow microspheres. Our analysis indicates that detection of electric fields as small as ~500V/m may be possible using water filled, hollow solid polydimethylsiloxane (PDMS) microspheres. The electric field sensitivities for solid spheres, on the other hand, are significantly smaller. Results of experiments carried out using solid PDMS spheres agree well with the analytical prediction.

In this paper, we demonstrate a micro-optical wall pressure sensor concept based on the optical modes of dielectric resonators. The sensing element is a spherical micro-resonator with a diameter of a few hundred micrometers. A latex membrane that is flush mounted on the wall transmits the normal pressure to the sensing element. Changes in the wall pressure perturb the sphere's morphology, leading to a shift in the optical modes. The wall pressure is measured by monitoring the shifts in the optical modes. Prototype sensors with polydimethylsiloxane micro-spheres are tested in a steady two-dimensional channel flow and in a plane wave acoustic tube. Results indicate sensor resolutions of ∼20 mPa and bandwidth of up to 2 kHz.

We report an optical wall shear stress sensor based on the whispering gallery mode (WGM) shifts of dielectric micro-resonators. The optical resonators are spheres with a typical diameter of several hundred microns and they serve as the sensing element. The wall shear force acting on a movable plate is transmitted mechanically to the microsphere. As a result of the applied force, the shape of the resonator is perturbed leading to a shift of the optical resonance (WGM). The one-dimensional wall shear stress is measured by monitoring these WGM shifts. Shape perturbations of the order of a nanometer can be detected with this optical method. The measurement resolution and range can be optimized by using dielectric sphere materials of different stiffness covering a wide range of flows. Prototype sensors using PDMS spheres have been built and validated in a laminar Poiseuille flow and in a plane wave acoustic tube.

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Wall shear stress measurements are carried out in a planar backward-facing step flow using a micro-optical sensor. The sensor is essentially a floating element system and measures the shear stress directly. The transduction method to measure the floating element deflection is based on the whispering gallery optical mode (WGM) shifts of a dielectric microsphere. This method is capable of measuring floating element displacements of the order of a nanometer. The floating element surface is circular with a diameter of ∼960 μm, which is part of a beam that is in contact with the dielectric microsphere. The sensor is calibrated for shear stress as well as pressure sensitivity yielding 7.3 pm Pa −1 and 0.0236 pm Pa −1 for shear stress and pressure sensitivity, respectively. Hence, the contribution by the wall pressure is less than two orders of magnitude smaller than that of shear stress. Measurements are made for a Reynolds number range of 2000-5000 extending to 18 step heights from the step face. The results are in good agreement with those of earlier reports. An analysis is also carried out to evaluate the performance of the WGM sensor including measurement sensitivity and bandwidth.

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Optical modes of dielectric micro-cavities have received significant attention in recent years for their potential in a broad range of applications. The optical modes are frequently referred to as "whispering gallery modes" (WGM) or "morphology dependent resonances" (MDR) and exhibit high optical quality factors. Some proposed applications of micro-cavity optical resonators are in spectroscopy, micro-cavity laser technology, optical communications as well as sensor technology. The WGM-based sensor applications include those in biology, trace gas detection, and impurity detection in liquids. Mechanical sensors based on microsphere resonators have also been proposed, including those for force, pressure, acceleration and wall shear stress. In the present, we demonstrate a WGM-based electric field sensor, which builds on our previous studies. A candidate application of this sensor is in the detection of neuronal action potential. The electric field sensor is based on polymeric multi-layered dielectric microspheres. The external electric field induces surface and body forces on the spheres (electrostriction effect) leading to elastic deformation. This change in the morphology of the spheres, leads to shifts in the WGM. The electric field-induced WGM shifts are interrogated by exciting the optical modes of the spheres by laser light. Light from a distributed feedback (DFB) laser (nominal wavelength of ~ 1.3 μm) is side-coupled into the microspheres using a tapered section of a single mode optical fiber. The base material of the spheres is polydimethylsiloxane (PDMS). Three microsphere geometries are used: (1) PDMS sphere with a 60:1 volumetric ratio of base-to-curing agent mixture, (2) multi layer sphere with 60:1 PDMS core, in order to increase the dielectric constant of the sphere, a middle layer of 60:1 PDMS that is mixed with varying amounts (2% to 10% by volume) of barium titanate and an outer layer of 60:1 PDMS and (3) solid silica sphere coated with a thin layer of uncured PDMS base. In each type of sensor, laser light from the tapered fiber is coupled into the outermost layer that provides high optical quality factor WGM (Q ~ 10(6)). The microspheres are poled for several hours at electric fields of ~ 1 MV/m to increase their sensitivity to electric field.