The paper describes and discusses the design and testing of an efficient and high-sensitive calorimetric thermal sensor to measure simultaneously the magnitude and the direction of wall shear stress in aerodynamic flows. The main technical application targeted is the back flow and the flow separation detection for active flow control. The measurement principle is based on the flow-induced forced heat convection transfer on a heater element. The sensor is micro-structured with three parallel substrate-free wires presenting a high aspect ratio and supported by periodic perpendicular SiO2 micro-bridges ensuring a mechanical toughness and a thermal insulation relatively to the bulk substrate with high thermal inertia. The central wire is made of a multilayer structure (Au/TiSiO2/Ni/Pt/Ni/Pt/Ni/SiO2) and is composed of a heater element (Au/Ti) and a thermistor (Ni/Pt/Ni/Pt/Ni) enabling to measure the heater temperature. The upstream and downstream wires are thermistors enabling to operate in the calorimetric mode. This design provides a high temperature gradient and a homogeneous temperature distribution along the wires. The sensor operates in both constant current mode and constant temperature mode, with a feedback on current enabled by uncoupling heating and measure. Welded on a flexible printed circuit, the sensor was flush mounted on the wall of a turbulent boundary layer wind tunnel. The experiments, conducted in both attached and separated flow configurations, demonstrate the sensor sensitivity to the wall shear stress up to 2.4 Pa and the ability of the sensor to perform flow direction sensing for back-flow detection in a separated flow configuration.

We present an efficient and high-sensitive thermal micro-sensor for near wall flow parameters measurements. By combining substrate-free wire structure and mechanical support using silicon oxide micro-bridges, the sensor achieves a high temperature gradient, with wires reaching 1 mm long for only 3 lm wide over a 20 lm deep cavity. Elaborated to reach a compromise solution between conventional hot-films and hot-wire sensors, the sensor presents a high sensitivity to the wall shear stress and to the flow direction. The sensor can be mounted flush to the wall for research studies such as turbulence and near wall shear flow analysis, and for technical applications, such as flow control and separation detection. The fabrication process is CMOS-compatible and allows on-chip integration. The present letter describes the sensor elaboration, design, and microfabrication, then the electrical and thermal characterizations, and finally the calibration experiments in a turbulent boundary layer wind tunnel.

A microscale low power high temperature gradient calorimetric (HTGC) sensor measuring both mean and fluctuating bidirectional wall shear stress is presented. The micromachined sensor is composed of three freestanding 3 µm × 1 mm micro-wires mechanically supported using perpendicular micro-bridges. The static and dynamic characterisations were performed in a turbulent boundary layer wind tunnel on a flat plate configuration, and compared to the one obtained with a conventional hot-film probe. The results demonstrated that the calorimetric sensor behaves similarly to the hot-film in constant temperature anemometry with nonetheless lower power consumption and better spatial resolution and temporal response. Additionally, its calorimetric measurement detected the direction of the wall shear stress component orthogonal to the wires, corresponding to the shear stress sign in 2D flows. The

Bound states in continuum (BICs) are resonances with zero width (infinite lifetime) without any leakage into the surrounding media. Their fascinating properties and potential applications have attracted a great deal of interest. In this paper, we give an analytical, numerical, and experimental demonstration of BICs in simple acoustic structures based on either a single solid layer or a triple solid-liquid-solid layer inserted between two liquids. These modes are an intrinsic property of the inserted structure (solid layer or solidliquid-solid triple layer) with free surfaces and are independent of the surrounding media. Two kinds of BICs are discussed: (i) Fabry-Perot (FP) BICs exist as the consequence of the intersection of the local resonances induced by inserted structure intersect the transmission zeros induced by the solid layers. (ii) Symmetry-protected (SP) BICs occur when appear at normal incidence due to the decoupling of the transverse modes in the solid layer from the longitudinal modes that propagate in the solid and solidliquid multilayer media. When the incidence angle departs slightly from the BIC conditions, the latter transform into Fano resonances characterized by an asymmetric line shape in the transmission spectra. In addition, we show that the transmission zeros give rise to negative delay times and therefore acoustic superluminal effect. The theoretical results are obtained by means of the Green's function method, whereas the experimental measurements are carried out in ultrasonic domain using plexiglass plates in water. These results may have important applications to realize subsonic and acoustic superluminal phenomena as well as acoustic filters and sensors.

This letter describes and discusses the design and testing of an efficient nanogap Pirani micro-sensor for pressure measurements in a wide range with a maximum sensitivity around atmospheric pressure. The structure combines a substrate-free heated wire and a mechanical support made of silicon oxide micro-bridges allowing both a constant nanoscale gap between the wire and the substrate and a 1 mm long and 3 µm wide wire. The high aspect ratio of wire provides a uniform heating profile along the wire and contributes to low pressure detection. At the opposite, both the nanoscale gap and the short wire length between two micro-bridges contributes to shift the high limit of the pressure range. Tested between 10 kPa and 800 kPa, the sensor presents a wide measurement range, not fully reached by the experiments, with a maximum of sensitivity close to the atmospheric pressure and performances with up to 38 %/dec sensitivity when operating in constant temperature mode with an overheat of 20˚C.

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This paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement range between 10 kPa and about 800 kPa, in both constant current and constant temperature mode. The last mode enables high-sensitive measurements with a maximum of sensitivity around atmospheric pressure, enabling the use of the sensor for applications in aerodynamics and fluid dynamics, such as active flow control.

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