Paper-based capacitive mass sensor

Abstract

Paper-based MEMS is a new area in electro mechanical systems. We have develop MEMS sensing device that is capable of mea small as 2mg (~20μN) with a sensitivity of 0.5f device, we monitored changes in capacitance va related to mass changes. This capacitive-ba which uses a cantilever beam design, promotes use of paper in the design of micro systems. Th in this paper on building a capacitive sensor because the overall costs are considerably methods used can serve as a building block to co and analyses for future MEMS sensors.

Tuning the hygro-mechanical response of paper-based systems using glycerol

“…Liu et al (2011) constructed a piezoresistive force sensor by printing a carbon resistor at the root of a paper-based cantilever beam. In another example, Allen et al (2011) implemented a capacitive mass sensor comprising a cantilever beam and a varying gap capacitor using highly available materials such as Bristol paper and aluminum foil. A motion sensor was developed by Liu et al (2017) to monitor motion in hands and finger joints.…”

Design and Development of Photonic Biosensors for Swine Viral Diseases Detection

“…These sensors are based on a high number of detectable parameters (conductivity, mass, optical properties, etc.) and present a lot of potential applications [1,2].…”