Paper-based MEMS is a new area in electro mechanical systems. We have develop MEMS sensing device that is capable of mea small as 2mg (~20μN) with a sensitivity of 0.5f device, we monitored changes in capacitance va related to mass changes. This capacitive-ba which uses a cantilever beam design, promotes use of paper in the design of micro systems. Th in this paper on building a capacitive sensor because the overall costs are considerably methods used can serve as a building block to co and analyses for future MEMS sensors.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.