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2008
DOI: 10.1117/12.798729
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Optical roughness measurements on specially designed roughness standards

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Cited by 9 publications
(4 citation statements)
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“…3D surface measurements using an optical metrology device (Infinite‐Focus, Alicona) illustrate the surface topography of a tested surface. Figures 3 and 4 show Alicona 3D surface topography of the notch surface of the tested specimen for both the nondamaged state and damaged state, respectively 31,32 . In this study, the measured surface topography parameters are the arithmetical mean height ( Sa), root‐mean‐square height ( Sq), maximum peak height ( Sp), maximum valley depth ( Sv), maximum height ( Sz), and 10‐point height ( Sz10).…”
Section: Description Of the Experimental Apparatusmentioning
confidence: 99%
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“…3D surface measurements using an optical metrology device (Infinite‐Focus, Alicona) illustrate the surface topography of a tested surface. Figures 3 and 4 show Alicona 3D surface topography of the notch surface of the tested specimen for both the nondamaged state and damaged state, respectively 31,32 . In this study, the measured surface topography parameters are the arithmetical mean height ( Sa), root‐mean‐square height ( Sq), maximum peak height ( Sp), maximum valley depth ( Sv), maximum height ( Sz), and 10‐point height ( Sz10).…”
Section: Description Of the Experimental Apparatusmentioning
confidence: 99%
“…In the Focus‐Variation system of Alicona, the topographical and color information are created from the variation of focus where the small depth of focus of an optical system is combined with vertical scanning. The vertical resolution of the Infinite‐Focus system reaches 20 nm 31,32 …”
Section: Description Of the Experimental Apparatusmentioning
confidence: 99%
“…In the experiments, Alicona images have been taken (approximately) synchronously with ultrasonic testing (UT) data in order to provide a ground truth for the results of analysis from UT signals. Since the Alicona metrology also provides information on surface topography, they have been used to measure both the surface average roughness (S α , the arithmetical mean height of a surface) and crack tip opening displacement (CTOD) [15,16].…”
Section: Optical Metrology Devicementioning
confidence: 99%
“…As a result, it faithfully reproduces the amplitude of the primary profile. Moreover, the optical measurement device InfiniteFocus by Alicona generates very few discontinuities as it measured a 3D dataset using the focus variation technology, and the larger amount of data used for calculation gives representative and repeatable results (Danzl et al 2008).…”
Section: Topographic Parameters Explaining the Tactile Sensation Of Rmentioning
confidence: 99%