The development of two irregular-geometry material measures for performance verifying surface topography measuring instruments is described. The material measures are designed to be used to performance verify tactile and optical areal surface topography measuring instruments. The manufacture of the material measures using diamond turning followed by nickel electroforming is described in detail. Measurement results are then obtained using a traceable stylus instrument and a commercial coherence scanning interferometer, and the results are shown to agree to within the measurement uncertainties. The material measures are now commercially available as part of a suite of material measures aimed at the calibration and performance verification of areal surface topography measuring instruments.
The electro-forming technique is used at National Institute of Standards and Technology (NIST) for the production of standard reference material (SRM) 2461 standard casings to support nationwide ballistics measurement traceability and measurement quality control in the US. In order to ensure that the SRM casings are produced with virtually the same surface topography, it is necessary to test the decay factors of the replication process. Twenty-six replica casings are replicated from the same master casing for the decay factor tests. The NIST topography measurement system is used for measurements and correlations of surface topography. The topography decays are quantified by the cross-correlation function maximum CCFmax. Based on the test, it is expected that 256 SRM casings can be replicated from the same master with CCFmax values higher than 95%.
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