Optical micro encoder using surface-emitting laser

Matsubara, Hiroshi; Yamamoto, Eiji; Ito, Masataka; Hashimoto, S.; Komazaki, I.; Shinohara, S.; Yanagisawa, K.

doi:10.1109/memsys.1996.494017

Cited by 4 publications

(4 citation statements)

References 3 publications

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“…For the catheter‐type micromachine system, a micro optical tactile sensor applied to an interferometer using a surface‐emitting laser was developed for detecting the contact of the end of the catheter with the inner wall of blood vessels during insertion[11]. This sensor is 1.8 × 1.4 × 0.45mm in size and shows a high sensitivity of 1mN.…”

Section: Examples Of Micro Sensors Developed In the Projectmentioning

confidence: 99%

Micro sensor developments in Japan

Tsuruta¹,

Mikuriya²,

Ishikawa³

1999

Sensor Review

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This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.

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Section: Examples Of Micro Sensors Developed In the Projectmentioning

confidence: 99%

Micro sensor developments in Japan

Tsuruta¹,

Mikuriya²,

Ishikawa³

1999

Sensor Review

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“…Although a transmission-type encoder was usually pursued to conveniently dispose its constituent elements, it suffered from shortcomings such as bulky size and poor integration. When the encoder is built resting on an active alignment rather than a passive alignment, its cost effectiveness is critically degraded [10]- [12]. In order to produce an output signal in response to the displacement of an object, the pattern of the code scale should be adaptively transferred, either directly to an array of small PD cells, which are elaborately disposed with a higher accuracy than the pitch of the code scale, or to a plain PD via a secondary scale pattern, serving as an analyzer [13]- [21].…”

Section: Introductionmentioning

confidence: 99%

Reflective Optical Encoder Capitalizing on an Index Grating Imbedded in a Compact Smart Frame

Lee

2014

IEEE Photonics J.

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A reflective optical encoder has been proposed and realized capitalizing on a miniaturized sensing head, which integrates both a pair of index gratings and a beam router in a plastic smart frame. The index gratings play a role in selectively transmitting the incident beam carrying the periodic grating pattern of a code scale. The beam router, consisting of a collimating lens in conjunction with a prism, is used to collimate and steer the beam originating from a vertical-cavity surface-emitting laser (VCSEL) toward the code scale. The proposed encoder is rigorously designed by ray optic simulations and manufactured by passively aligning a smart frame, which is produced by plastic injection molding, with a VCSEL at ¼ 850 nm and two semicircular photodetectors. The index grating is created by forming an Al grating pattern of a 10-m pitch on a silica substrate. Two output signals provide sinusoidal signals, which are 90 out of phase from each other. The period of the signals is 4 s at a frequency of 250 kHz, which is equivalent to a period of 10 m. As expected, the relative phase relationship is reversed by altering the direction of rotation of the code scale. By examining either of the two output signals, we can simply demonstrate positional and angular resolutions of about 10 m and 0.04 , respectively. The attained resolutions can be readily enhanced to 2.5 m and 0.01 , by simultaneously taking into account the two signals with a distinct 90 phase difference.

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“…, et al[51] developed a microencoder using a surface emitting laser. Quasi-sinusoidal signal was obtained with a scale of 20 tm in pitch.…”

mentioning

confidence: 99%

<title>Application of micromachining technology to optical devices and systems (Same as Vols. 2880 and 2882, p. 2)</title>

Fujita

1996

SPIE Proceedings

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Micromachine technologies based on IC-compatible micromachining have advantages denoted by three "M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems(MEMS) are reviewed. microelectronics are also promising[24]. 2/SPIE Vol. 2881 O-8194-22797/961$6.OO Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/23/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx SPIEVo!. 2881/3 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/23/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx [60] M.

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Optical micro encoder using surface-emitting laser

Cited by 4 publications

References 3 publications

Micro sensor developments in Japan

Micro sensor developments in Japan

Reflective Optical Encoder Capitalizing on an Index Grating Imbedded in a Compact Smart Frame

<title>Application of micromachining technology to optical devices and systems (Same as Vols. 2880 and 2882, p. 2)</title>

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