<title>Application of micromachining technology to optical devices and systems (Same as Vols. 2880 and 2882, p. 2)</title>

Abstract

Micromachine technologies based on IC-compatible micromachining have advantages denoted by three "M's'. Miniaturization is the most popular but Multiplicity, which means the batch fabrication capability of many complicated elements, and Microelectronics to control motions or to add different functions such as the optical function are equally important. This paper deals with the application of micromachine technologies to micro optical devices. A basic concept making the best use of the advantages is proposed. Recent examples of optical microelectromechanical systems(MEMS) are reviewed. microelectronics are also promising[24]. 2/SPIE Vol. 2881 O-8194-22797/961$6.OO Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/23/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx SPIEVo!. 2881/3 Downloaded From: http://proceedings.spiedigitallibrary.org/ on 06/23/2016 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx [60] M.