Micro sensor developments in Japan

Tsuruta, Kazuhiro; Mikuriya, Y.; Ishikawa, Yuichi

doi:10.1108/02602289910255568

Cited by 17 publications

(6 citation statements)

References 16 publications

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“…Fig. 4(g), illustrates a fine image fiberscope device which can perform active curvature operations for inspection of tiny and confined areas such as a microfactory [5]. A shape memory alloy (SMA) coil actuator enables the fiberscope to move through a tightly curved area.…”

Section: (A)mentioning

confidence: 99%

Optomechatronic Technology: The Characteristics and Perspectives

Cho

Kim²

2005

IEEE Trans. Ind. Electron.

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Abstract-In recent years, optical technology has been incorporated into mechatronic systems at an accelerated rate, and as a result, a great number of machines/systems with smart optical components have been introduced. This integrated technology is termed "optomechatronics." This paper introduces the fundamental concept, definition, and characteristics of the technology by analyzing the characteristics of a variety of practical optomechatronic systems. The introduction describes how optical and mechatronic components are physically coupled to each other to form optomechatronic integration. With this observation, we describe the nature and integration concept of the technology, from which we can derive the technology-driven fundamental functionalities in some detail. Based upon the knowledge on basic optomechatronic integration and functions, we analyze optomechatronic systems in general from the viewpoint of system configuration and design and, thus, the roles of optical technology in overall system performance being learned and the synergistic effects due to its fusion with mechatronics being understood.

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Section: (A)mentioning

confidence: 99%

Optomechatronic Technology: The Characteristics and Perspectives

Cho

Kim²

2005

IEEE Trans. Ind. Electron.

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“…Although the miniaturization of robots has conventionally been progressed by mechanical machining and assembling, there are some difficulties in achieving further miniaturizations. In particular, frame parts, actuators, motion controllers, power sources and sensors [2]. Instead of the conventional mechanical machining, micro electro mechanical systems (MEMS) technology [3] based on IC production lines has been studied for making micro robot components [4].…”

Section: Introductionmentioning

confidence: 99%

Biomimetics micro robot with CMOS IC neural networks locomotion control

Takahama

Tanida

Takato

et al. 2013

IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society

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In this paper, we presented the 4.0, 2.7, 2.5 (mm), width, length, height size biomimetics micro robot system which was inspired by ant. The micro robot system was made from silicon wafer fabricated by micro electro mechanical systems (MEMS) technology. The mechanical system of the robot was equipped with small size rotary type actuators, link mechanisms and six legs to realize the insect-like switching behavior. In addition, we constructed the complementary metal oxide semiconductor integrated circuit neural networks (CMOS IC NN) as a locomotion controlling system. The CMOS IC NN utilized the pulse-type hardware neuron model (P-HNM) as a basic component. The CMOS IC NN outputs the driving pulses using synchronization phenomena such as biological neural networks. The driving pulses can operate the actuators of the biomimetics micro robot directly. Therefore, the CMOS IC NN realized the robot control without using any software programs or A/D converters. The micro robot emulated the locomotion method and the neural networks of an insect with rotary type actuators, link mechanisms and CMOS IC NN. The micro robot performed forward and backward locomotion, and also changed direction by inputting an external trigger pulse. The locomotion speed was 26.4 (mm/min) when the step width was 0.88 (mm).

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“…The miniaturization of the microrobot system has been done using mechanical machining. There are some difficulties regarding actuators, frame parts, motion controllers, sensors, and power sources in order to achieve further miniaturization [ 9 ]. Instead of mechanical machining, microfabrication technology based on integrated circuit (IC) technology has been used to make the miniaturized actuators [ 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Miniaturized Rotary Actuators Using Shape Memory Alloy for Insect-Type MEMS Microrobot

et al. 2016

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Although several types of locomotive microrobots have been developed, most of them have difficulty locomoting on uneven surfaces. Thus, we have been focused on microrobots that can locomote using step patterns. We are studying insect-type microrobot systems. The locomotion of the microrobot is generated by rotational movements of the shape memory alloy-type rotary actuator. In addition, we have constructed artificial neural networks by using analog integrated circuit (IC) technology. The artificial neural networks can output the driving waveform without using software programs. The shape memory alloy-type rotary actuator and the artificial neural networks are constructed with silicon wafers; they can be integrated by using micro-electromechanical system (MEMS) technology. As a result, the MEMS microrobot system can locomote using step patterns. The insect-type MEMS microrobot system is 0.079 g in weight and less than 5.0 mm in size, and its locomotion speed is 2 mm/min. The locomotion speed is slow because the heat of the shape memory alloy conducts to the mechanical parts of the MEMS microrobot. In this paper, we discuss a new rotary actuator compared with the previous model and show the continuous rotation of the proposed rotary actuator.

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Micro sensor developments in Japan

Cited by 17 publications

References 16 publications

Optomechatronic Technology: The Characteristics and Perspectives

Optomechatronic Technology: The Characteristics and Perspectives

Biomimetics micro robot with CMOS IC neural networks locomotion control

Miniaturized Rotary Actuators Using Shape Memory Alloy for Insect-Type MEMS Microrobot

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