Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers

Hofstetter, Daniel; Zappe, Hans; Dändliker, R.

doi:10.1109/50.566688

Cited by 20 publications

(17 citation statements)

References 30 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to thermal fluctuations on the chip, a noise current with an amplitude of about 20 pA was seen in the detector current, such that the signal noise corresponded to about 5% of the output signal amplitude. A more comprehensive study of the measurement resolution and some noise issues appeared elsewhere [35].…”

Section: Position Sensor Based On Dmimentioning

confidence: 99%

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

Hofstetter

Maisenholder

Zappe

1998

IEEE J. Select. Topics Quantum Electron.

Self Cite

View full text Add to dashboard Cite

Abstract-Various applications of quantum-well intermixing, ranging from multiwavelength lasers to complex photonic integrated circuits, are described. The fabrication of these GaAs-AlGaAs-based devices relies on the postgrowth definition of regions with varying bandgap, enabling the manufacture of wavelength shifted modulators and lasers, as well as the integration of transparent waveguides with absorbing lasers and detectors. The impurity-free vacancy-enhanced disordering technique employed, and its integration with existing process technologies, will be presented, and examples of multicolor lasers, wavelength shifted modulators and integrated optical interferometers are shown. These applications yield high-optical functionality using relatively simple process and integration technology.Index Terms-Interferometers, monolithic integration, multiwavelength lasers, photonic integrated circuits, quantum-well intermixing.

show abstract

Section: Position Sensor Based On Dmimentioning

confidence: 99%

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

Hofstetter

Maisenholder

Zappe

1998

IEEE J. Select. Topics Quantum Electron.

Self Cite

View full text Add to dashboard Cite

show abstract

“…An alternative monolithic displacement sensor based on a Michelson interferometer realized by stripe waveguides was developed at CSEM [179,180]. As shown schematically in Figure 1.15, the optical chip consisted of a dual Michelson interferometer, with two reference arms and photodetectors, a DBR laser as mutual light source [181], and a phase shifter for each reference arm.…”

Section: Displacement Sensorsmentioning

confidence: 99%

Semiconductor Optical Sensors

Zappe

1999

Sensors Update

View full text Add to dashboard Cite

“…The optics responsible for proper beam forming is the microlens fabricated using photolithography, sputtering deposition and dry etching, directly on the laser diode substrate, what strongly increases the level of miniaturization and integration. Multitude of available mictrotechnologies and resulting immensity of configurations, allowed authors of paper [5] to report integrated double Michelson interferometric displacement measurement system, which is not only able to measure the displacement magnitude, but also its direction with resolution of 20 nm. In this instrumentation the main advantage of general microfabrication technologies, is visible in replacement of free-space propagation with waveguide one by integration of interferometric channels with other elements of interferometres in one semiconductor chip using III-V semiconductor system usually utilized in telecommunication.…”

Section: Introductionmentioning

confidence: 99%

Micro-optics in advanced optical metrology

Jóźwik

2013

SPIE Proceedings

View full text Add to dashboard Cite

An accurate characterization is a very important topic in a wide range of MEMS/MOEMS applications and crucial for their fabrication process. Standard characterization is performed with bulk measurement system. Usually, a high resolution optical systems measure one structure at a time and scan the measurement samples from structure to structure. These systems are not well suited to the production control of microsystems, where several thousands of structures are fabricated on the same substrate simultaneously. The paper presents new approaches using microoptics and micromachining to overcome the large ratio of wafer size to feature size in the testing step of production. The refractive and diffractive microoptical components, often fabricated on glass wafer, allow to create arrays of integrated measurement instruments. This work focuses on a new full-field optical concept for parallel, high volume M(O)EMSs' testing. The use of diffraction gratings for the realization of an array of integrated interferometers allows to create compact device with 25 measurement channels. The design of measurement platform and interferometer array, its assembly and the validation measurement results, are discussed in details. The functionality of system includes static and dynamic in-line characterization of MEMS.

show abstract

Optical displacement measurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers

Cited by 20 publications

References 30 publications

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

Quantum-well intermixing for fabrication of lasers and photonic integrated circuits

Semiconductor Optical Sensors

Micro-optics in advanced optical metrology

Contact Info

Product

Resources

About