Abstract-Various applications of quantum-well intermixing, ranging from multiwavelength lasers to complex photonic integrated circuits, are described. The fabrication of these GaAs-AlGaAs-based devices relies on the postgrowth definition of regions with varying bandgap, enabling the manufacture of wavelength shifted modulators and lasers, as well as the integration of transparent waveguides with absorbing lasers and detectors. The impurity-free vacancy-enhanced disordering technique employed, and its integration with existing process technologies, will be presented, and examples of multicolor lasers, wavelength shifted modulators and integrated optical interferometers are shown. These applications yield high-optical functionality using relatively simple process and integration technology.Index Terms-Interferometers, monolithic integration, multiwavelength lasers, photonic integrated circuits, quantum-well intermixing.
Sub-micron-period surface gratings on Ta O waveguide layers were produced by ablation with a sub-ps-UV-laser. The 2 5 structure is generated by projection imaging of a primary transmission grating mask. A grating of 500 nm period with a surface modulation depth of 10 nm on a sample area of about 300 mm = 300 mm can be produced with a single laser pulse of about 100 mJrcm 2 at 248 nm. Adjustment of the modulation depth to specific requirements can be accomplished by varying laser fluence or pulse number. The structures can be used as grating couplers. q 1999 Elsevier Science B.V. All rights reserved.
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