Optical diagnostic of LiNbO3 etching in NF3/Ar ICP plasma: Part I

Осипов, А. А.; Alexandrov, Sergei; Berezenko, Vladimir I.; Speshilova, Anastasiya; Vorobyev, Alexandr; Осипов, А. А.

doi:10.1016/j.sna.2021.113146

Cited by 4 publications

(2 citation statements)

References 25 publications

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“…However, as can be seen from the plots in figure 3a, changing the temperature on the substrate holder has no effect on the intensities of all considered spectral lines. This is probably due to the fact that changing the substrate temperature doesn't affect the average energy of electrons and concentration of electrons [10]. Therefore, in further experiments on the study of optical spectra, we set the substrate holder temperature at 50℃ in order to reduce the time spent on heating the substrate holder.…”

Section: Resultsmentioning

confidence: 99%

OES diagnostics of NF₃/Xe plasma for deep structures in LiNbO₃

Осипов

Gagaeva

Speshilova

et al. 2022

J. Phys.: Conf. Ser.

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In this work, in situ non-perturbing method of optical emission spectroscopy is used to examine the features of the emission spectra of NF3/Xe plasma, which can be used for the process of continuous plasma-chemical etching of lithium niobate. To understand the physicochemical processes occurring in plasma, the influence of high-frequency power, pressure in the chamber, bias voltage and substrate temperature on the emission intensities of the F, N, Xe lines was studied. It was determined that increasing the bias voltage from -300 to -50 V and the temperature from 50 to 300°C doesn’t change the relative intensities of the analysed spectral lines, while increasing the high-frequency power from 500 to 750W and decreasing the pressure from 1.95 to 0.95Pa increase the intensities of the F, N, Xe lines.

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Section: Resultsmentioning

confidence: 99%

OES diagnostics of NF₃/Xe plasma for deep structures in LiNbO₃

Осипов

Gagaeva

Speshilova

et al. 2022

J. Phys.: Conf. Ser.

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“…Another reason for the smoothing effect is stimulation of the lateral movement of atoms along the surface when the cluster collides with matter. Precision flattening of the surface with cluster ions may be particularly of interest in the case of lithium niobate [22], taking into account the numerous work on the manufacture of nanostructures on its surface using a co-focused ion beam (FIB) [23] or reactive etching [24], which usually leads to a high surface roughness.…”

Section: Introductionmentioning

confidence: 99%

Sputtering and ripples formation by gas cluster ions on LiNbO-=SUB=-3-=/SUB=- crystal

Ieshkin

Kiselev

Senatulin

et al. 2022

Physics of the Solid State

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The work addresses the creation of surface structures on lithium niobate single crystals. Surface topography of lithium niobate surface sputtered with gas cluster ion beams was investigated. Surface ripples induced on the surface were analyzed using power spectral density functions approach, their evolution with ion fluence and their dependence on the cluster ion energy discussed. Sputter yield value was shown to decrease with surface roughness increase, the reasons of the effect are indicated. Local piezoresponse of the rippled surface was studied. Keywords: ferroelectrics, LiNbO3 crystal, gas cluster ions, self-organization, AFM, PSD function.

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