2023
DOI: 10.1016/j.ceramint.2022.10.112
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Nanometer-sized etching of lithium niobate domain wall devices

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Cited by 4 publications
(3 citation statements)
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“…ETT is carried out on special stands under strict temperature control. The difference in the failure rate of devices in hermetic and plastic cases is explained by a greater number of cases of gate breakdown in the latter, which are more sensitive to static charges than devices in hermetic metal cases [55].…”
Section: Rejection Testsmentioning
confidence: 99%
“…ETT is carried out on special stands under strict temperature control. The difference in the failure rate of devices in hermetic and plastic cases is explained by a greater number of cases of gate breakdown in the latter, which are more sensitive to static charges than devices in hermetic metal cases [55].…”
Section: Rejection Testsmentioning
confidence: 99%
“…The dead layers at the interfaces suppress sneak current paths which otherwise can occur through persistent domain walls directly bridging metal contacts and also serve as natural embedded selectors for the cell. The mesa-structured memory cells including operation at sub-20 nm and low voltages by extending the side electrodes to the mesa surface exhibit an exceptionally high OFF–ON ratio of >10 6 with endurance over a billion cycles and show promise for the fabrication of high-density crossbar memory arrays (Figures j,k). , By extending the side electrodes to the mesa surface, energy-efficient but at the same time a fast operation of the cells could be achievedspecifically low and high currents for the write and read voltages, respectively. Erasable domain wall diodes composed of persistent and transient walls in the mesa-structured memory cells have also been utilized to realize full and half-wave rectification functionality .…”
Section: Information Storage Multilevel States and Synaptic Functiona...mentioning
confidence: 99%
“…For the improvement, Ao et al invented a new etching technology of the LNO using CMOS-compatible SiO 2 masks, which can maintain highprecision fidelity of patterns in promoting massive production of LNO memories on the Si substrates. [76] The improved manufacturing process in high reliability is foreseeable during tailoring dual functions of storage and selector with an adjustable onset voltage. During the cell scaling study, Hu et al found the existence of a critical size depending on the strain mismatching between the LNO film and the substrate, leading to higher readout wall current and good polarization retention.…”
Section: Planar Mesa-type Dw Memorymentioning
confidence: 99%