2018
DOI: 10.1088/1742-6596/955/1/012040
|View full text |Cite
|
Sign up to set email alerts
|

On one peculiarity of the model describing the interaction of the electron beam with the semiconductor surface

Abstract: Abstract. The problem of heat distribution in semiconductor materials irradiated with sharply focused electron beams in the absence of heat exchange between the target and the external medium is considered by mathematical modeling methods. For a quantitative description of energy losses by probe electrons a model based on a separate description of the contributions of absorbed in the target and backscattered electrons and applicable to a wide class of solids and a range of primary electron energies is used. Us… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
1
0
3

Year Published

2018
2018
2022
2022

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 7 publications
(4 citation statements)
references
References 6 publications
0
1
0
3
Order By: Relevance
“…Here we explore the potential application of low-frequency hybrid modes excited from the electron beam that is externally injected into the system as a free energy source. Several authors have described the production of electron beam and its potential application as a plasma generator [16][17][18][19][20]. Although the densities of plasma species in the semiconductor are low compared to the required quantum plasma densities in many metals, the reduced mass of electrons and holes due to periodic lattice potential of crystal validates the quantum condition…”
Section: Introductionmentioning
confidence: 99%
“…Here we explore the potential application of low-frequency hybrid modes excited from the electron beam that is externally injected into the system as a free energy source. Several authors have described the production of electron beam and its potential application as a plasma generator [16][17][18][19][20]. Although the densities of plasma species in the semiconductor are low compared to the required quantum plasma densities in many metals, the reduced mass of electrons and holes due to periodic lattice potential of crystal validates the quantum condition…”
Section: Introductionmentioning
confidence: 99%
“…Отметим, что для однородных материалов проведено моделирование явлений тепломассопереноса и для остро сфокусированного электронного зонда [7]- [9], в т.ч. и с использованием численных методов [10], [11].…”
Section: Introductionunclassified
“…Учет нагрева полупроводникового материала особенно существенен при использовании концентрированных источников воздействия, например, сфокусированных электронных пучков, широко используемых в электронно-зондовых технологиях (см. [3,22,23]).…”
unclassified