New Sensors for Automotive and Aerospace Applications

Abstract

Subject classification: 73.40.Qv; 73.50.Dn; S5.11; S6 In modern cars, sensors, actuators and electronic components play an increasing role. Driving forces are the demand for improved safety, higher comfort as well as increased economy and ecology. The paper presents an overview on semiconductor sensors that had been designed to reach such objectives. Examples for micromachined silicon sensors as well as highly innovative devices based on wide-bandgap semiconductor materials are presented. Spin-offs to aerospace applications are also discussed.

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

“…The processing can be supported by wafer bonding [123,216]. Selective deposition of SiC structures is used as well [21,395]. Subsequent to SiC patterning, the free standing micro-or nanostructures are released by employing rear side [216,389,394] or front side Si etching with SiC undercut [197,216,273,393,397].…”

“…Finally, the pyroelectricity of group III nitrides [14][15][16][17] offers completely new possibilities to integrate additional functionality into MEMS devices. AlGaN/GaN-heterostructures contain a highly conductive two-dimensional electron gas (2DEG) at the interface, which is sensitive to mechanical load, as well as to chemical modification of the surface, and can be used for novel sensing principles [18][19][20][21].…”

“…The main applications for these materials are electronic (high power, temperature and frequency) and optoelectronic devices (detectors, light emitting and laser diodes) [10,22,23]. Recently, sensing applications have been given increased attention (mainly gas sensors for harsh environment) [18][19][20][21]. In contrast, MEMS applications are rather low developed, concentrated mainly on less-integrated SiC devices, and are considered only to a very low extent as promising variants to use integrated functional layers.…”

Tin Oxide Nanosheets on Microelectromechanical System Devices for Improved Gas Discrimination

“…This technology has been continuously applied to protect humans and the environment from hazardous gases. Furthermore, gas sensors are expected to be in considerable demand in future industries, such as aerospace, mobility, and healthcare. − Hence, many studies are being carried out to improve the performance of gas-sensing devices through methods such as surface modification and composition control. − Additionally, studies regarding the miniaturization of sensors and the introduction of flexible materials are being carried out to expand the applications of such devices. − …”

The role of oxygen in hydrogen sensing by a platinum-gate silicon carbide gas sensor: An ultrahigh vacuum study

“…2-4͔͒ and corrosive gases. 2,5,6 Figure 1 shows a schematic diagram of a typical device. Such devices have been successfully demonstrated for monitoring automotive exhaust, 7,8 flue gases from power plants, [9][10][11] and selective catalytic reduction in diesel engines.…”