The role of oxygen in hydrogen sensing by a platinum-gate silicon carbide gas sensor: An ultrahigh vacuum study

Abstract

Articles you may be interested inInfluence of gridded gate structure on gas sensing behavior of hydrogen

Controlled functionalization of a double-junction n+/n−/n+ polysilicon nanobelt for hydrogen sensing application

“…The treatment can be conducted in dilute hydrogen ambient 26) or alternating between oxidizing and reducing gases for several hours at elevated temperature. [27][28][29][30] These processes are known to stabilize and improve the performance of the devices. Besides, the catalyst growth parameters 25) were also known to have some effects on the sensing properties of hydrogen sensors.…”

A new 4H-SiC hydrogen sensor with oxide ramp termination

“…This is due to the relative simplicity of the fabrication process, together with their high sensitivity and signal amplification capability. Starting from the standard capacitor structure: catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) [10], the technological processes were continually adjusted for better-quality structures, notable progress in sensing qualities being reported [11][12][13]. Despite their well-known drawbacks, the most used catalytic gate metal remains Pd [8] and Pt [14], while the most research effort is concentrated on the improving the oxide characteristics.…”

Influence of Contact Metallisation on the High Temperature Characteristics of High-κ Dielectrics

“…A popular structure for monitoring environmental conditions within hazardous ambients is the SiC-based Metal-Insulator-Semiconductor (MIS) capacitor, which uses a catalytic gate contact such as Pt, Pd or Ir to enable the dissociation of gases at extreme temperatures [4,5]. Depending upon the materials selected for the catalyst and insulator layers, the sensitivity and selectivity of the sensor can be varied, enabling a wide range of gas species to be monitored.…”

“…Depending upon the materials selected for the catalyst and insulator layers, the sensitivity and selectivity of the sensor can be varied, enabling a wide range of gas species to be monitored. Combinations of materials that have been researched to date include Pd/TiO 2 , Pt/SiO 2 and Pt/LaF 3 , which have revealed sensitivity to a variety of gas species including: hydrogen, oxygen, chlorofluorocarbons and hydrogen sulphide [4][5][6][7]. Hence, enhancing compatibility with current CMOS technology and aiding incorporation within larger integrated circuits.…”