2021
DOI: 10.1021/acsanm.1c03778
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Tin Oxide Nanosheets on Microelectromechanical System Devices for Improved Gas Discrimination

Abstract: A thin film consisting of SnO 2 nanosheets was synthesized as a sensing material for microelectromechanical system devices. These SnO 2 nanosheets exhibited superior sensing of biomarker gases in addition to specificity, since the nanosheets were mainly exposed to the (101) crystal facet. The analysis of sensor characteristics showed that hydrogen, acetone, isoprene, and toluene were more separated after the introduction of the SnO 2 nanosheets, which showed the specificity of the sensor. This indicated that w… Show more

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Cited by 9 publications
(4 citation statements)
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References 40 publications
(52 reference statements)
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“…Due to the superiority of SnO 2 nanosheets to biomarker gases, the films formed by SnO 2 nanosheets can be used as sensing materials for microelectromechanical system devices [164,165]. These Wang groups [166] proposed a new ternary nanocomposite Fe 2 O 3 pressure sensor/ C@SnO 2 .…”
Section: Tin Oxide (Sno 2 )mentioning
confidence: 99%
“…Due to the superiority of SnO 2 nanosheets to biomarker gases, the films formed by SnO 2 nanosheets can be used as sensing materials for microelectromechanical system devices [164,165]. These Wang groups [166] proposed a new ternary nanocomposite Fe 2 O 3 pressure sensor/ C@SnO 2 .…”
Section: Tin Oxide (Sno 2 )mentioning
confidence: 99%
“…Various metal oxide nanostructures have been developed for use in future devices. In particular, ZnO, 14–25 TiO 2 , 26–49 and SnO 2 nanostructures 50–73 have attracted attention for use in chemical sensors, gas sensors, batteries, photocatalysts, and other devices. Several review articles summarized the advanced studies in this field 6,7,74,75 …”
Section: Cold Crystallization and Morphology Control Of Zno Nanostruc...mentioning
confidence: 99%
“…In addition, the gas selectivity of sensors should also be improved to facilitate the identification of a plurality of gaseous components. A method of identifying gases was recently developed that relies on analyzing signals from different gas species using multiple sensors. Such sensing applications require multiple low-concentration gas sensors with different selectivities; thus, many commercially available sensors have been developed based on SnO 2 and ZnO. However, further improvements to the performance and selectivity of these sensors are required to facilitate the detection of gases at low concentrations and the identification of target gases.…”
Section: Introductionmentioning
confidence: 99%