Capacitance spectroscopy under illumination and at a forward bias close to the open-circuit voltage (V
oc) has recently been proposed to characterize interface states in a-Si : H/c-Si heterojunctions, and the interface defect density, D
it, is estimated from the simulations of capacitance. In this paper, the theoretical diffusion capacitance, C
D, is presented for measurement to directly characterize the interface states. By solving the excess minority carrier density in c-Si when interface states are introduced, the expression of C
D is developed as a function of D
it, the excess minority carrier density out of c-Si depletion and diffusion regions, Δn, and the carrier diffusion lengths in c-Si. C
D decreases with increasing D
it since the interface states act as recombination centres to decrease the excess carrier density in c-Si. The measurement is sensitive to D
it down to 1010 cm−2 eV−1. Accordingly, in the measurement of Δn and the carrier diffusion lengths in c-Si, the interface states can be characterized directly and accurately by the theoretical diffusion capacitance.