2015
DOI: 10.1088/0957-4484/27/3/035706
|View full text |Cite
|
Sign up to set email alerts
|

Nanoscale multilevel switching in Ge2Sb2Te5thin film with conductive atomic force microscopy

Abstract: We demonstrate three-level data storage in amorphous Ge2Sb2Te5 (GST) thin film by conductive atomic force microscopy (C-AFM). Due to the high resolution and current sensitivity of AFM, the electrical properties of GST are investigated in the nanoscale. By applying an electric field between an AFM probe tip and the GST surface, well-resolved threshold switching and memory switching are obtained successively in a current-voltage sweeping. Correspondingly, three states with high, intermediate and low resistances,… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
13
0

Year Published

2016
2016
2024
2024

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 15 publications
(13 citation statements)
references
References 30 publications
0
13
0
Order By: Relevance
“…One of the most intriguing features of PCRAM arises from its multi-level function that was also observed in phase-change electrical probe memory by Yang et al [ 51 ]. As reported in [ 52 ], the test sample consists of a 10 nm amorphous GST layer and a n-type Si substrate deposited on a metal sample holder via an Ag paste, while the probe tip is made of antimony doped Si coated with Pt-Ir. By changing the bias voltage applied between metal sample holder and probe tip from 0 V to 10 V, the electrical resistance of the GST layer exhibits three distinct states, namely amorphous OFF state, amorphous ON state, and crystalline state, thus indicating three storage levels (e.g., ‘0’, ‘1’, ‘2’).…”
Section: Current Status Of Phase-change Electrical Probe Memorymentioning
confidence: 99%
See 1 more Smart Citation
“…One of the most intriguing features of PCRAM arises from its multi-level function that was also observed in phase-change electrical probe memory by Yang et al [ 51 ]. As reported in [ 52 ], the test sample consists of a 10 nm amorphous GST layer and a n-type Si substrate deposited on a metal sample holder via an Ag paste, while the probe tip is made of antimony doped Si coated with Pt-Ir. By changing the bias voltage applied between metal sample holder and probe tip from 0 V to 10 V, the electrical resistance of the GST layer exhibits three distinct states, namely amorphous OFF state, amorphous ON state, and crystalline state, thus indicating three storage levels (e.g., ‘0’, ‘1’, ‘2’).…”
Section: Current Status Of Phase-change Electrical Probe Memorymentioning
confidence: 99%
“…( b ) the corresponding resistance of the amorphous OFF state, amorphous ON state and crystalline state. Reproduced with permission from [ 52 ]. Copyright Iop Science, 2015.…”
Section: Figurementioning
confidence: 99%
“…15 is reported to be thermodynamically stable at the temperature below 550 °C, demonstrating its long retention time at archival temperature [ 89 ]. Meanwhile, the ability to achieve multi-level recording using phase-change probe memory was also demonstrated recently [ 111 ]. It was found that the resistance of the GST thin film can be toggled among three different states (high, intermediate, and low resistances) by carefully controlling the voltage between the conductive probe and the GST layer, as shown in Fig.…”
Section: Reviewmentioning
confidence: 99%
“…16 a Current-voltage spectrum of amorphous GST thin film measured in the range of 0–10 V with C-AFM; b the corresponding resistance of the amorphous OFF state, amorphous ON state, and crystalline state. Reprinted with permission from [ 111 ]
Fig. 17 a Topography ( left sub-panel ) and SthM ( right sub-panel ) images with 10 μm and b 8 μm scan sizes, revealing a crystalline line written into 200 nm GT and GST amorphous thin films by a focused laser beam.
…”
Section: Reviewmentioning
confidence: 99%
See 1 more Smart Citation