Multistage, monolithic ceramic microdischarge device having an active length of ∼0.27 mm

Abstract. The field of microplasmas gained recognition as a well-defined area of research and application within the larger field of plasma science and technology about 20 years ago. Since then, the activity in microplasma research and applications has continuously increased. A survey of peer reviewed papers on microplasmas published annually shows a steady increase from fewer than 20 papers in 1995 to about 75 in 2005 and more than 150 in 2014. This count excludes papers that deal exclusively with technological applications where the microplasma is used solely as a tool. This topical review aims to provide a snap shot of the current state of microplasma research and applications. Given the rapid proliferation of microplasma applications, the topical review will focus primarily on the status of microplasma science and our understanding of the physics principles that enable microplasma operation. Where appropriate, we will also address microplasma applications, however, we will limit the discussion of microplasma applications to examples where the application is closely tied to the plasma science. No attempt is made to provide a comprehensive and in-depth review of the diverse range of all microplasma applications, except for the inclusion of a few key references to recent reviews of microplasma applications.

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“…38). A ceramic structure with three microdischarge cells in series was successfully operated in Ne by Vojak et al [113].…”

Section: Series Operation Of Microcavity Dischargesmentioning

confidence: 99%

20 years of microplasma research: a status report

Schoenbach

Becker²

2016

Eur. Phys. J. D

174

112

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“…Devices which have been built include proximity sensors, gas flow sensors, electrochemical sensors, and pressure sensors. Vojak et al created a ceramic microdischarge device with LTTC technology, housing a stable Ne-discharge in a cylindrical cavity of 140 lm diameter and 230 lm length at a voltage of 137 V. [63] For organic synthesis, a ceramic microreactor for the methoxylation of methyl-2-furoate has been demonstrated. [64] Finally, Wilcox et al demonstrated that the technology is mature by integrating a PEM (polymer electrolyte membrane) fuel cell design including methanol gas reforming.…”

Section: Meso-scaled Devices Based On Co-fired Ceramic Tape Technologymentioning

confidence: 99%

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule¹,

Vuillemin

Gauckler

2003

Advanced Materials

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Processing techniques are reviewed that allow the introduction of ceramic components made from powders into microelectromechanical systems (MEMS). Ceramics have several advantages over other materials also in microsystems, e.g., heat resistance, hardness, corrosion resistivity, or functional properties. The range of available materials in microfabrication technology is being increased beyond those deposited by thin‐film technology. Top–down approaches like mechanical and laser‐based direct writing processes, ink‐jet printing, microextrusion, and lithography‐based methods are presented. They are complemented by some more fundamental work in the field of bottom–up synthesis of micro‐ and nanoscaled ceramic materials.

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“…Recently, Vojak et al 5 described the characteristics of single, ϳ150 m diam microdischarge devices fabricated in a multilayer ceramic structure. Ceramic is of interest for two primary reasons: ͑1͒ its suitability for high temperature operation and aggressive chemical environments, and ͑2͒ the existing commercial investment in ceramic multilayer technology, driven by wireless and microfluidics systems applications, which has resulted in a versatile platform for integrating electronic, mechanical, and optical components.…”

mentioning

confidence: 99%

Ceramic microdischarge arrays with individually ballasted pixels

Allmen

McCain

Ostrom

et al. 2003

Applied Physics Letters

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Arrays of cylindrical microdischarge devices, ∼200 μm in diameter, have been fabricated with internally recessed annular electrodes in multilayer ceramic structures and operated both continuously and with pulsed excitation in the rare gases at pressures up to 800 Torr of Ne and 300 Torr of Xe. The overall thickness of the ceramic structure is ∼1.6 mm and each microdischarge is individually ballasted by a ∼225 kΩ resistor, produced and integrated into the structure by a thick film process. Arrays as large as 13×13 pixels have been tested to date. Spatially uniform glow discharges are generated in the pixels for all of the pressures investigated and strong emission from excited states of the singly charged Xe ion, lying ∼26–27 eV above the neutral (…5p6 1S0) ground state, is observed. For a 169 element array drawing a total current of 30 mA, the output power of the array in the 300–1000 nm spectral region falls to ∼55% of its initial value in ∼8.3 h of continuous operation with a static gas fill.

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Multistage, monolithic ceramic microdischarge device having an active length of ∼0.27 mm

Cited by 30 publications

References 10 publications

20 years of microplasma research: a status report

20 years of microplasma research: a status report

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Ceramic microdischarge arrays with individually ballasted pixels

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