Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule, Martin; Vuillemin, Sibylle; Gauckler, Ludwig J.

doi:10.1002/adma.200300375

Cited by 73 publications

(41 citation statements)

References 111 publications

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“…A low-viscosity fluid was patterned through the spontaneous filling of PDMS microchannels by capillary action in micromolding in the capillaries MIMIC. 42 After curing the prepolymer into a solid, the PDMS mold was removed to reveal patterned microstructures of the polymer. In the imprinting method, a mold was pressed into a layer of a viscous prepolymer film on a substrate, which can flow under pressure to conform to the mold.…”

Section: Ceramic Nanostructures Via Lithographic Techniquesmentioning

confidence: 99%

Fabrication of SiC-Based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Lithographic Techniques-A Review

Yoon

Lee

Kim

2006

J. Ceram. Soc. Japan

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Review péÉÅá~ä fëëìÉ Äó dìÉëí bÇáíçêëW lêÖ~åáÅ-íç-fåçêÖ~åáÅ`çåîÉêëáçå mêçÅÉëë Ñçê mçäóãÉê-aÉêáîÉÇ`Éê~ãáÅë c~ÄêáÅ~íáçå çÑ pá`_~ëÉÇ`Éê~ãáÅ jáÅêçëíêìÅíìêÉë Ñêçã mêÉÅÉê~ãáÅ mçäóãÉêë ïáíÜ p~ÅêáÑáÅá~ä qÉãéä~íÉë~åÇ iáíÜçÖê~éÜáÅ qÉÅÜåáèìÉë-^oÉîáÉï Processes for fabricating ceramic microstructures are in demand for use in areas such as microreactors and MEMS that can be used in harsh environments requiring a high temperatures tolerance, corrosion resistance, as well as tribological properties. This review describes the manufacture of tailored porous SiC ceramic microstructures using sacrificial templates, the feasible applications of microporous structures and microchannels as a microreactor, and microfabrication of preceramic polymers using soft lithography and sterolithography. Macroporous and mesoporous SiC ceramic structures have been fabricated using various templates including packed silica sphere assemblies, porous carbon templates, and nanoporous silica structures. In addition, SiC nanotubes have also been obtained from an alumina membrane used as a template. These porous structures were generally obtained using a series of infiltration, curing and pyrolysis, and chemical or oxidative etching steps. Complicated SiC ceramic microfeatures were fabricated using near-net shape lithographic techniques to preceramic polymers. Line patterns and porous channels were produced by soft lithography, whereas the 3D woodpile structures were fabricated using stereolithography. These novel structures show great promises for use in high temperature micro-reactors for the on-demand reforming of higher hydrocarbons into hydrogen in portable power sources. It is expected that the integration of preceramic polymers into new economic manufacturing strategies such as precursor casting in templates and lithography utilization will be a break-through technology for the creation of complex ceramic nanostructures.

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Section: Ceramic Nanostructures Via Lithographic Techniquesmentioning

confidence: 99%

Fabrication of SiC-Based Ceramic Microstructures from Preceramic Polymers with Sacrificial Templates and Lithographic Techniques-A Review

Yoon

Lee

Kim

2006

J. Ceram. Soc. Japan

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“…Robo-casting, automated direct-ink writing, three-dimensional printing (3DP), or micro-pen writing offer a powerful route for producing complex periodic 3-D structures at length scales from micrometers to millimetres [76][77][78]. According to the scheme depicted in Fig.…”

Section: D-printingmentioning

confidence: 99%

Novel deposition techniques for metal oxide: Prospects for gas sensing

Sahner

Tuller

2008

J Electroceram

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With the growing need for high performance gas sensors, a variety of preparation methods have been introduced and investigated. In the present contribution, the focus is on novel means for preparing metal oxide gas sensor devices. First, the key gas sensor concepts are reviewed as well as the conventional deposition techniques widely used for thick and thin film deposition of metal oxides such as screen-printing and chemical and physical vapour deposition. This is followed by a review and examination of innovative deposition techniques developed within the past several years, focusing on methods with direct-write features as well as techniques offering precise control of micro-and nano-structural features of the deposited materials.

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“…Therefore, the preparation processes for high quality oriented grown oxide thin films without single crystal substrates have been recently developed along with some seed layer methods, such as the ion beam assisted deposition and the Langmuir-Blodgett nanosheet deposition [6][7][8][9][10]. While these processes have achieved fabrications of high quality oriented oxide heterostructures, they still need further improvements for an on-demand fabrication of the oriented grown films to elaborate in the oxide electronics, such as micro-electro-mechanical systems (MEMS), [11,12] because of their process restrictions. Thus, it is a very important issue to further develop the oriented film growth techniques for future high-integration applications.…”

Section: Introductionmentioning

confidence: 99%