Atmospheric-pressure, non-equilibrium plasmas are susceptible to instabilities and, in particular, to arcing (glow-to-arc transition). Spatially confining the plasma to dimensions of 1 mm or less is a promising approach to the generation and maintenance of stable, glow discharges at atmospheric-pressure. Often referred to as microdischarges or microplasmas, these weakly-ionized discharges represent a new and fascinating realm of plasma science, where issues such as the possible breakdown of ‘pd scaling’ and the role of boundary-dominated phenomena come to the fore. Microplasmas are generated under conditions that promote the efficient production of transient molecular species such as the rare gas excimers, which generally are formed by three-body collisions. Pulsed excitation on a sub-microsecond time scale results in microplasmas with significant shifts in both the temperatures and energy distribution functions associated with the ions and electrons. This allows for the selective production of chemically reactive species and opens the door to a wide range of new applications of microplasmas. The implementation of semiconductor and microelectronics and MEMs microfabrication techniques has resulted in the realization of microplasma arrays as large as 250,000 devices. Fabricated in silicon or ceramics with characteristic device dimensions as small as 10 µm and at packing densities up to 104 cm−2, these arrays offer optical and electrical characteristics well suited for applications in medical diagnostics, displays and environmental sensing. Several microplasma device structures, including their fundamental properties and selected applications, will be discussed.

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A direct‐current, cold‐atmospheric‐pressure air plasma microjet (PMJ) sustained in a quasi‐steady gas cavity in a liquid medium is used to inactivate Staphylococcus aureus (S. aureus) suspended in the liquid. The temperature and the pH value of the liquid change to steady‐state values of about 40 °C and 3.0–4.5, respectively, after 10 min of plasma treatment. The decrease in the pH is attributed to the reaction of NOx produced in the air plasma with water at the gas–liquid interface. The concentrations of NO 3− and NO 2− are measured to be 37 mg · L−1 and 21 mg · L−1, respectively, after a 20 min of plasma treatment. Effective inactivation of S. aureus is found to start after the pH values decreases to about 4.5. This is attributed to the high oxidizing potential of the perhydroxyl radical (HOO•) on the fatty acid in the cell membranes of the microorganisms in the liquid.