Multilayer Cr/Sc Mirrors with Improved Reflection for the “Water Transparency Window” Range

Intrinsic roughness and interfaces of Cr/Be multilayers

“…In the case of chemically neutral film materials, mixing at the boundaries is mainly determined by the energy of atoms condensing on the surface. In particular, it was shown (Bibishkin et al, 2005;Polkovnikov et al, 2020) that a decrease in the energy of sputtering argon ions leads to a noticeable decrease in the mixing of materials at the interfaces and allows for a transition to the region of shorter periods. For layer materials that chemically interact, passivation technology with ion-assisted deposition or reactive sputtering can be used (Kuznetsov et al, 2015).…”

Investigation of the emission properties of gas-jet targets in the water transparency window" of 2.3-4.4 nm under pulsed laser excitation

“…MXRM based on Cr/Sc were used (structure period 3.65 nm, thickness Cr -1.3 nm, number of structure periods -140). A detailed description of the MXRM characteristics based on the Cr/Sc structure is given in [21]. When using such a combination of MXRM and film filters, it is possible to study the wavelength range 3.1−7 nm.…”

“…For the directly used installation, filters and mirrors in accordance with [21], the energy concentrated in the emission line E line and the number of photons N line can be determined as follows:…”

Prospective wavelengths for projection lithography uing synchrotron radiation

“…Interlayer roughness has the greatest negative effect on reflection coefficients. For example, at a wavelength of 3.12 nm, the theoretical reflection coefficient Cr/Sc MXRM is 63%, while in practice the record reflection coefficient is only 21−23% [15,16] and, due to the fact that the level of roughness already achieved is at the atomic level and is about 0.3 nm, there is no need to wait for drastic improvements.…”