Intrinsic roughness and interfaces of Cr/Be multilayers

Abstract

The structures of Cr/Be multilayer mirror interfaces are investigated using X-ray reflectometry, diffuse X-ray scattering and atomic force microscopy. The combination of these methods makes it possible to separate the contributions of roughness and interlayer diffusion/intermixing for each sample. In the range of period thicknesses of 2.26–0.8 nm, it is found that the growth roughness of the Cr/Be multilayer mirrors does not depend on the period thickness and is ∼0.2 nm. The separation of roughness and diffuseness allows estimation of layer material intermixing and the resulting drop in the optical contrast, which is from 0.85 to 0.17 in comparison with an ideally sharp structure.

Investigation of structural and reflective characteristics of short-period Mo/B4C multilayer X-ray mirrors

“…First, the value of the interlayer roughness remains practically unchanged for all structures � ' 1 A ˚with a slight tendency to increase at period values of about 10 A ˚. Such behaviour of the interlayer roughness indicates preservation of the continuity of such ultrathin films and was observed earlier in Cr/Be MLM (Pleshkov et al, 2021). In that work, this effect was explained by the formation of chromium beryllides in the case of ultrathin layers.…”

Project of a two-mirror monochromator for the photon energy range 8-36 keV for the "SKIF" synchrotron

“…Among the most promising systems were Cr/Be, Cr/B4C. In the literature for short-period MXRM, we found data on the length of transition regions only for Cr/Be [10] and which was σ = 0.43 nm. In the study [1], the Cr/B4C pair was discussed, but no data on the length of the transition regions were given.…”

Multifitting 2: software for reflectometric, off-specular and grazing-incidence small-angle scattering analysis of multilayer nanofilms

“…Examples of the use of Multifitting can be seen in prior work (Chkhalo et al, 2017;Svechnikov et al, 2017Svechnikov et al, , 2018Barysheva et al, 2019;Smertin et al, 2022;Polkovnikov et al, 2022;Pleshkov et al, 2021;Svechnikov et al, 2020;Chkhalo et al, 2022).…”