We have measured the absolute intensities of the spectral lines of Kr, Ar, and O ions (CO2 gas), which are of interest for reflectometry, microscopy, and lithography in the wavelength range of 10 – 18 nm. We have used pulsed excitation by an Nd : YAG laser with an output wavelength λ = 1064 nm, a pulse energy of 0.8 J, a pulse duration of 5.2 ns and a pulse repetition rate of 10 Hz. The targets are formed during gas outflow through a pulsed supersonic conical nozzle for an inlet gas pressure of 3.5 bar. A spectrometer based on X-ray multilayer mirrors and its calibration procedure are described in detail. The absolute intensities of the spectral lines of Kr IX (λ = 11.5 nm; number of photons: N = 9.3 × 1012 photons pulse−1), Ar VIII (λ = 13.84 nm, N = 3 × 1012 photons pulse−1), and O VI (λ = 12.98 nm, N = 5.17 × 1012 photons pulse−1). The results are compared with the data obtained for Xe ions under the same experimental conditions at the same wavelengths.
The article discusses the results of studying the emission spectra of liquid hexane C6H14, dichloromethane CH2Cl2, methylene bromide CH3Br upon excitation by pulsed laser radiation. We used a Nd : YAG,laser, λ=1064 nm, tau=5.2 ns, Epulse=0.8 J. The spectral range of 4-20 nm was studied. We used injector with a hole 225 μm ?m in diameter, operating in a pulsed mode to form a liquid-droplet jet. The emission spectra of these liquid-jet targets were obtained. The obtained spectra were decoded, and the ions emitting in this spectral range were determined Keywords: extreme ultraviolet radiation, emission spectra, laser spark, x-ray spectrometer-monochromator, liquid jets.
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