2016
DOI: 10.1016/j.egypro.2016.07.044
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Multifunctional Dielectric Layers for the Fabrication of Ultra-Simplified n-PERT c-Si Solar Cells

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Cited by 5 publications
(2 citation statements)
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“…Moreover, compared to other ex-situ doping processes (e.g. based on BBr3 diffusion or ion implantation), the one proposed here involves only one additional process step compared to in-situ doping, namely the deposition of the SiON:B doping layer by PECVD, which can be used as an anti-reflective coating and thus does not require subsequent etching [34]. We also note that the as-dep Si(i)/SiON:B stack could in principle be deposited through a unique PECVD step, which could make this ex-situ doping process comparable to in-situ doping in terms of number of process steps.…”
Section: Variation Of the Doping Profile With Increasing Annealing Temperaturementioning
confidence: 99%
“…Moreover, compared to other ex-situ doping processes (e.g. based on BBr3 diffusion or ion implantation), the one proposed here involves only one additional process step compared to in-situ doping, namely the deposition of the SiON:B doping layer by PECVD, which can be used as an anti-reflective coating and thus does not require subsequent etching [34]. We also note that the as-dep Si(i)/SiON:B stack could in principle be deposited through a unique PECVD step, which could make this ex-situ doping process comparable to in-situ doping in terms of number of process steps.…”
Section: Variation Of the Doping Profile With Increasing Annealing Temperaturementioning
confidence: 99%
“…Bifacial cells produced by Yingli, 1) Mission Solar, LG, and PVGS 2) are of the passivated emitter, rear totally diffused type (PERT). [3][4][5][6] The bifacial cells produced by Panasonic=Sanyo are based on heterojunction technology. 7) Other cell types such as variations of the passivated emitter and rear cell (PERC) 8,9) and even back contact cell concepts can be bifacial.…”
Section: Introductionmentioning
confidence: 99%