Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

Kuo, Fu-Yen; Lin, Ching Yu; Chuang, Po-Chun; Chien, Chun-Lin; Yeh, Yu-Chen; Wen, Stella Kuei-Ann

doi:10.1109/jeds.2017.2666821

Cited by 19 publications

(10 citation statements)

References 14 publications

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“…Other contributions that exploit similar approaches are also available in the literature [46]. Another remarkable case study is reported in [47]. The peculiarity is that it leverages a unique type of MEMS sensor, exploited to diversify the implemented sensing functions.…”

Section: B Multisensory Monolithic Devicesmentioning

confidence: 99%

A perspective vision of micro/nano systems and technologies as enablers of 6g, super-iot, and tactile internet [point of view]

Iannacci

2023

Proc. IEEE

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Section: B Multisensory Monolithic Devicesmentioning

confidence: 99%

A perspective vision of micro/nano systems and technologies as enablers of 6g, super-iot, and tactile internet [point of view]

Iannacci

2023

Proc. IEEE

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“…(d) resonant sensor mounted on top of a covar-header [142]. Kuo et al [143]integrated a multiple sensor on a single innovative System-on-chip design resonator structure. The fabrication of the proposed MEMS resonator is performed using UMC 0.18 µm 1-poly 6 metal CMOS/ MEMS's process followed by anisotropic and isotropic etching technique to released MEMS structure.…”

Section: Etchingmentioning

confidence: 99%

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Verma¹,

Gupta²

2021

Preprint

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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“…A fully differential MEMS oscillator structure was implemented, as shown in Figure 6a. The prototype of this MEMS oscillator is based on [20]. This structure consists of two driving ports, two sensing ports, and a movable shutter.…”

Section: Structure Of Mems Resonatormentioning

confidence: 99%

Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

Lin

Pan²,

Wen

2021

Micromachines

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In this study, a multi-function microelectromechanical system (MEMS) was integrated with a MEMS oscillator, using the resonant frequency oscillation characteristics of the oscillator to provide the Lorentz current of the magnetometer to enhance a large dynamic range of reading, which eliminates the off-chip clock and current generator. The resonant frequency can be adjusted by adjusting the bias voltage of the oscillator to further adjust the sensitivity of the magnetometer. With the mechanical Q value characteristic, a great dynamic range can be achieved. In addition, using the readout circuit of the nested chopper and correlated double-sampling (CDS) to reduce the noise and achieve a smaller resolution, the calibration circuit compensates for errors caused by the manufacturing process. The frequency of the tuning range of the proposed structure is 17,720–19,924 Hz, and the tuning range of the measurement result is 110,620.36 ppm. The sensitivities of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 218.3, 74.33, and 7.5 μV/μT for ambient pressure of 760 torr. The resolutions of the x-, y-, and z-axes of the magnetometer with driving current of 2 mA are 3.302, 9.69, and 96 nT/√Hz for ambient pressure of 760 torr.

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Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

Cited by 19 publications

References 14 publications

A perspective vision of micro/nano systems and technologies as enablers of 6g, super-iot, and tactile internet [point of view]

A perspective vision of micro/nano systems and technologies as enablers of 6g, super-iot, and tactile internet [point of view]

Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Integrating Resonator to Enhance Magnetometer Microelectromechanical System Implementation with ASIC Compatible CMOS 0.18 μm Process

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