Si-based MEMS Resonant Sensor: A Review from Microfabrication Perspective

Abstract

With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensingdevices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adoptedto develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materialsselection to the ?final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

A review of piezoelectric MEMS sensors and actuators for gas detection application

“…However, MEMS devices are capable to perform these tasks despite their small sizes [2]. In addition, MEMS can be defined as miniaturized mechanical and electromechanical elements that are made through microfabrication techniques with dimensions varying from below one micron in the smallest elements all the way to several millimeters [2][3][4][5][6][7]. MEMS devices have been designed in several structural varying from simple structural with an element that does not perform any movement to extremely complex electromechanical system that contained multiple elements that performed sophisticated action and movement under the control of integrated microelectronic circuits [8].…”