Monolithic Integration of Micron-scale Piezoelectric Materials with CMOS for Biomedical Applications

Shi, Chuncheng; Costa, Tiago; Elloian, Jeffrey; Shepard, Kenneth L.

doi:10.1109/iedm.2018.8614632

Cited by 13 publications

(8 citation statements)

References 5 publications

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“…The mote consists of a temperature sensor IC manufactured in a 0.18-m bulk CMOS technology monolithically integrated (35) with a microscale piezoelectric transducer made of lead zirconate titanate (PZT) (36). Free from any bonding wires, solder joints, and circuit boards, this 0.3-mg mote measures only 380 m by 300 m by 570 m (0.065 mm 3 ) with direct mechanical and electrical connections between the transducer (300 m by 300 m by 267 m) and the IC.…”

Section: Design Of the Monolithic Ultrasonic Motementioning

confidence: 99%

Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing

et al. 2021

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There has been increasing interest in wireless, miniaturized implantable medical devices for in vivo and in situ physiological monitoring. Here, we present such an implant that uses a conventional ultrasound imager for wireless powering and data communication and acts as a probe for real-time temperature sensing, including the monitoring of body temperature and temperature changes resulting from therapeutic application of ultrasound. The sub–0.1-mm3, sub–1-nW device, referred to as a mote, achieves aggressive miniaturization through the monolithic integration of a custom low-power temperature sensor chip with a microscale piezoelectric transducer fabricated on top of the chip. The small displaced volume of these motes allows them to be implanted or injected using minimally invasive techniques with improved biocompatibility. We demonstrate their sensing functionality in vivo for an ultrasound neurostimulation procedure in mice. Our motes have the potential to be adapted to the distributed and localized sensing of other clinically relevant physiological parameters.

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Section: Design Of the Monolithic Ultrasonic Motementioning

confidence: 99%

Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing

et al. 2021

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“…The mechanism of using polarized bio piezoelectric materials with an internal electric field can regulate various physical behavior of human cells, which significantly helps in disease diagnosis and health monitoring. [245][246][247] These biopiezoelectric materials in Biomedical applications can be broadly classified into two major groups: Biosensing and therapeutics. Biosensing devices are portable and can work with the help of an external power source with biocompatibility, low cost, and high sensitivity.…”

Section: Role Of Pvdf In Biomedical Applicationsmentioning

confidence: 99%

Polyvinylidene fluoride, an advanced futuristic smart polymer material: A comprehensive review

Nivedhitha

Jeyanthi

2022

Polymers for Advanced Techs

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There was a fast development of various piezoelectric materials in the past two decades due to their numerous applications. Piezoelectric materials made up of natural quartz crystals were used in ultrasonic detectors in the early days. Later, the modern synthetic piezoelectric materials known as ferroelectric ceramics, such as Lead zirconate titanate (PZT), were developed, which were capable of exhibiting piezoelectricity several times greater than natural crystals. Later, the declination of ceramics began as they contained large amounts of lead content, which was considered harmful to both humans and the environment. Finally, a new era in the history of piezoelectric materials boomed with the outbreak of polymer materials. Polyvinylidene fluoride (PVDF) is a piezoelectric polymer material that has drawn the attention of researchers, from the family of fluoropolymers and has paved a new path in the field of polymer science and technology. PVDF has earned the renown of being an excellent piezoelectric material due to its unique and versatile exhibition of piezoelectric and dielectric properties. Furthermore, PVDF can exhibit incredible thermal stability and mechanical strength with flexible processing and low cost compared with the other piezoelectric crystals and ceramics. This comprehensive review mainly focuses on the evolution of piezoelectric materials from crystals to polymers with their advantages and significant drawbacks. Thus, the main objective of this review is to present a detailed description of PVDF concerning its uniqueness as a piezoelectric material and versatile properties, followed by various advanced fabrication techniques and their impact on doping various nanofillers with respective applications. Though PVDF is renowned for its significant applications such as sensors, actuators, energy harvesting and biomedical devices, a tabular chart has been specially framed in one‐liners which highlights the real‐time experimental outcomes where PVDF can be specified as a futuristic polymer for multifunctional applications. A few reports resulted that with increasing graphite and MWCNT fillers into PVDF film, the EMI shielding effectiveness value rose to 14.64 dB at a frequency of 8‐12 Hz. A few reports resulted that by adding ZnO and BaTiO3, the electrical output increased significantly, which is more suitable as a nanogenerator. After an extensive literature survey, we found that reviews are very limited and restricted to specific applications and properties. This review is an overall brief explanation of enormous research works carried out by various experts and presented in a modest way with pictorial and tabular representation for the convenience of researchers. Finally, this review attempts to provide source material to direct researchers towards a fertile area of research with a better understanding of the fundamentals and advancement of polymer piezoelectric materials.

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“…6b). For that reason, we have developed an integration method for a 2D array of PZT transducers directly on top of the IC [25,41] and illustrated in Fig. 10.…”

Section: Ultrasound Transducer Integrationmentioning

confidence: 99%

An Integrated 2D Ultrasound Phased Array Transmitter in CMOS With Pixel Pitch-Matched Beamforming

Costa

Shi

Tien

et al. 2021

IEEE Trans. Biomed. Circuits Syst.

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Emergingnon-imaging ultrasound applications, such as ultrasonic wireless power delivery to implantable devices and ultrasound neuromodulation, require wearable form factors, millisecond-range pulse durations and focal spot diameters approaching 100 µm with electronic control of its three-dimensional location. None of these are compatible with typical handheld linear array ultrasound imaging probes. In this work, we present a 4 mm x 5 mm 2D ultrasound phased array transmitter with integrated piezoelectric ultrasound transducers on complementary metal-oxide-semiconductor (CMOS) integrated circuits, featuring pixel-level pitch-matched transmit beamforming circuits which support arbitrary pulse duration. Our direct integration method enabled up to 10 MHz ultrasound arrays in a patch form-factor, leading to focal spot diameter of ~200 µm, while pixel pitchmatched beamforming allowed for precise threedimensional positioning of the ultrasound focal spot. Our device has the potential to provide a high-spatial resolution and wearable interface to both powering of highlyminiaturized implantable devices and ultrasound neuromodulation.

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Monolithic Integration of Micron-scale Piezoelectric Materials with CMOS for Biomedical Applications

Cited by 13 publications

References 5 publications

Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing

Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing

Polyvinylidene fluoride, an advanced futuristic smart polymer material: A comprehensive review

An Integrated 2D Ultrasound Phased Array Transmitter in CMOS With Pixel Pitch-Matched Beamforming

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Monolithic Integration of Micron-scale Piezoelectric Materials with CMOS for Biomedical Applications

Cited by 13 publications

References 5 publications

Application of a sub–0.1-mm 3 implantable mote for in vivo real-time wireless temperature sensing

Application of a sub–0.1-mm 3 implantable mote for in vivo real-time wireless temperature sensing

Polyvinylidene fluoride, an advanced futuristic smart polymer material: A comprehensive review

An Integrated 2D Ultrasound Phased Array Transmitter in CMOS With Pixel Pitch-Matched Beamforming

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Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing

Application of a sub–0.1-mm ³ implantable mote for in vivo real-time wireless temperature sensing