Modified U-shaped Microactuator with Compliant Mechanism Applied to a Microgripper

Vargas-Chable, Pedro; Tecpoyotl-Torres, M.; Cabello-Ruiz, R.; Ramírez, José Alfredo Rodrígez; Vargas-Bernal, Rafael

doi:10.3390/act8010028

Cited by 9 publications

(8 citation statements)

References 35 publications

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“…Bu çalışmada, mikro-aktüatörün tasarım sürecinde U tipi aktüatör referans alınmıştır. U-tipi mikro-aktüatör, birçok uygulamayı tasarlamak ve oluşturmak için kullanılan karakteristik bir MEMS cihazıdır [43]…”

Section: Tasarım Koşulları (Design Conditions)unclassified

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Ülkir¹

2021

Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi

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 Fabrication of microactuator  Fabrication with digital light processing  Characterization of the electrothermal microactuator In this study, the characterization of the electrothermal micro-actuator fabricated using digital light processing, which is one of the 3D fabrication methods, was realized using the image processing algorithm. For this aim, three different experiments were conducted during the fabrication process. During the fabrication process of the first two experiments, deterioration or breakage occurred in the micro-actuator structure. These problems did not occur in the fabrication of the 3rd experiment. Characterization process was done with the microactuator fabricated as a result of experiment 3. Based on the experimental results, the fabrication and displacement of the micro-actuator is carried out successfully. Figure A. Fabrication of electrothermal micro-actuator a) fabrication as a result of experiment 1 b) fabrication as a result of experiment 2, fabrication as a result of experiment 3 Purpose: This work aims to fabricate electrothermal micro-actuator with digital light processing method and characterize it with image processing algorithm. Theory and Methods: This work consists of three main phases, namely, design, fabrication and characterization. Results: It has been observed that the support structures used on the micro-actuator have a great influence on the 3D fabrication process. In the characterization process, when a voltage higher than 6V is applied to the micro actuator, it was observed that breakages or deteriorations occurred in its structure. Conclusion: It is concluded that the support structures are very important in the fabrication process of the micro-actuator using 3D fabrication technique. On the other hand, in the characterization process, it has been determined that the displacement of the micro-actuator is directly proportional to the applied voltage, but its structure is distorted after a point. As a result of experimental studies, the maximum displacement was measured as 3.84 µm at 6V voltage. As the actuator design is bidirectional, the maximum displacement of the micro-actuator was determined to be 7.68 µm.

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Section: Tasarım Koşulları (Design Conditions)unclassified

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Ülkir¹

2021

Gazi Üniversitesi Mühendislik Mimarlık Fakültesi Dergisi

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“…In other words, large output forces can be produced by applying relatively low voltages (below 10 V) [13,14]. Electrothermal actuators have been widely deployed for microgripping applications [16][17][18][19][20][21][22][23][24][25][26][27][28].…”

Section: Introductionmentioning

confidence: 99%

“…They include actuators and gripping arms made of thin silicon or stainless sheets, which are used to produce sufficient strength. Several research studies have reported on the design and performance analysis of microgrippers [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35]. The design aspects of these microstructures include the kinematic structure [18,24], the material selection [21,24], the actuation mechanism [16], the fabrication process [17,20], and the impact of the surrounding environment on their operation [21,22].…”

Section: Introductionmentioning

confidence: 99%

“…Several research studies have reported on the design and performance analysis of microgrippers [16][17][18][19][20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35]. The design aspects of these microstructures include the kinematic structure [18,24], the material selection [21,24], the actuation mechanism [16], the fabrication process [17,20], and the impact of the surrounding environment on their operation [21,22]. For instance, Vargas-Chable et al [16] designed an unconventional microgripper comprising hot and cold arms of varying area instead of uniform area.…”

Section: Introductionmentioning

confidence: 99%

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Modeling and Design Enhancement of Electrothermal Actuators for Microgripping Applications

Pour,

Ghommem,

Abdelkefi

2023

Applied Sciences

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Microgrippers are miniature tools that have the capability to handle and manipulate micro- and nano-scale objects. The present work demonstrates the potential impact of the incorporation of perforations on a ‘hot and cold arm’ electrothermal actuation mechanism in order to improve the operation of microgrippers in terms of arm opening and operating temperature. By applying a voltage to one arm and setting the other as a ground, the current passes through the electrothermal actuator and induces its displacement along the in-plane direction. The difference in the geometry of the two arms causes one arm to expand more than the other and this results in transverse bending. A computational model was developed using a finite element analysis tool to simulate the response of the thermal actuators with varying geometries and investigate the impact of incorporating perforations on the arms of the thermal actuators to enhance its performance in terms of deflection and operating temperature. The simulation results were compared to their experimental counterparts reported in the literature. A good agreement between the numerical and experimental data was obtained. A novel design of a microgripper, made of perforated electrothermal actuators, was introduced. Its main characteristics, including the tip opening of the gripper arms, the applied voltage, and the stress and temperature distributions, were analyzed using the developed computational model. Different perforation shape and distribution were investigated. The present study demonstrates the capability of perforations to enhance the operation of microgrippers as manifested by the obtained higher tip displacement and lower tip temperature in comparison to conventional microgripper designs made of non-perforated thermal actuators. Furthermore, the highest stress generated on the microgripper elements was found to be much lower than the yield strength of the constituent material, which indicates proper functioning without any mechanical failure.

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“…This enduring trend [2], together with the consequent evolution of massive low-cost and large-scale semiconductor and microelectronics technologies [3], also triggered the conception and manufacturing of micromechanical structures [4], paving the way to the birth and growth of Micro Electro-Mechanical Systems (MEMS) [5][6][7][8]. MEMS can be used as extremely miniaturized sensors, actuators, microgrippers [9][10][11], with different sorts of actuation [12][13][14], piezoelectric resonators [15,16], and wave-guides [17], to only name but a few. They share with microelectronic devices the same conceptual platform: processes, technologies, and facilities able to produce low-cost, large-volume fabrication steps [18,19].…”

Section: Introductionmentioning

confidence: 99%

Downsizing Effects on Micro and Nano Comb Drives

et al. 2022

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Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a test case compliant electrostatic micro or nano actuator that is under development with two preferred micro fabrication methods, namely, thick SOI and thin amorphous silicon. A series of numerical trials on materials strength, electro-mechanical characteristics, sensitivity and overall actuation performance have been carried out at different grades of down-scaling and of aspect ratio. This gave rise to new design charts that we propose here as a predictive and friendly guide to select the most appropriate micro fabrication method.

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Modified U-shaped Microactuator with Compliant Mechanism Applied to a Microgripper

Cited by 9 publications

References 35 publications

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Görüntü işleme algoritması kullanarak elektrotermal mikro-aktüatörün karakterizasyonu

Modeling and Design Enhancement of Electrothermal Actuators for Microgripping Applications

Downsizing Effects on Micro and Nano Comb Drives

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