Modeling and Design Enhancement of Electrothermal Actuators for Microgripping Applications

Abstract

Microgrippers are miniature tools that have the capability to handle and manipulate micro- and nano-scale objects. The present work demonstrates the potential impact of the incorporation of perforations on a ‘hot and cold arm’ electrothermal actuation mechanism in order to improve the operation of microgrippers in terms of arm opening and operating temperature. By applying a voltage to one arm and setting the other as a ground, the current passes through the electrothermal actuator and induces its displacement along the in-plane direction. The difference in the geometry of the two arms causes one arm to expand more than the other and this results in transverse bending. A computational model was developed using a finite element analysis tool to simulate the response of the thermal actuators with varying geometries and investigate the impact of incorporating perforations on the arms of the thermal actuators to enhance its performance in terms of deflection and operating temperature. The simulation results were compared to their experimental counterparts reported in the literature. A good agreement between the numerical and experimental data was obtained. A novel design of a microgripper, made of perforated electrothermal actuators, was introduced. Its main characteristics, including the tip opening of the gripper arms, the applied voltage, and the stress and temperature distributions, were analyzed using the developed computational model. Different perforation shape and distribution were investigated. The present study demonstrates the capability of perforations to enhance the operation of microgrippers as manifested by the obtained higher tip displacement and lower tip temperature in comparison to conventional microgripper designs made of non-perforated thermal actuators. Furthermore, the highest stress generated on the microgripper elements was found to be much lower than the yield strength of the constituent material, which indicates proper functioning without any mechanical failure.