Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Heinis, Dominique; Gorecki, Christophe; Bringer, Charlotte; Bardinal, Véronique; Camps, Thierry; Doucet, Jean‐Baptiste; Dubreuil, Pascal; Fontaine, C.

doi:10.1143/jjap.42.l1469

Cited by 15 publications

(11 citation statements)

References 10 publications

(9 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…in Doppler velocimeters [7] or displacement interferometric sensors [8]. We have demonstrated the viability of VCSEL-based feedback as an active detection method in high resolution SNOM imaging [9] with an alternative for miniaturisation of the optical microscopy device [10]. Recently, the experimental demonstration of this detection technique for confocal microscopy has been performed in semi-massive version [11].…”

Section: Active Signal Detectionmentioning

confidence: 97%

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

et al. 2006

Self Cite

View full text Add to dashboard Cite

International audienceIn the paper the new concept of fully integrated scanning confocal optical microscope on-chip is proposed. The operation of this microscope combines the 3-D transmissive scanning of VCSEL laser beam by use of two MOEMS scanners, and active signal detection, based on the optical feedback in the VCSEL laser cavity. The silicon-based electrostatically driven scanners provide controlled movement of two convex microlenses, working as an objective lens of microscope. Glass microlenses are monolithically integrated on movable silicon tables of scanners. The first results of technological investigation on the microscope components are presented

show abstract

Section: Active Signal Detectionmentioning

confidence: 97%

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

et al. 2006

Self Cite

View full text Add to dashboard Cite

show abstract

“…Besides, in VCSEL-based optical tweezers, focused beams from single-mode or multimodes devices are required [8]. More specific requirements concern the development of optical microprobes arrays for near-field scanning optical microscopy (NSOM) [9,10] or high-density data storage and optical reading [11]. In these cases, a strong beam focusing is desired at short distances (micrometric range) thanks to high throughput microtips.…”

Section: Micro-optics For Vcsels: Main Requirementsmentioning

confidence: 99%

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Bardinal

Camps

Reig

et al. 2011

Advances in Optical Technologies

View full text Add to dashboard Cite

We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration. These approaches imply either a hybrid assembly or a direct integration technique. They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level. In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing. Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.

show abstract

“…V ERTICAL cavity surface emitting lasers (VCSELs) are currently the first choice in photonic devices for an increasing range of applications, including short-distance data communications, optical sensors and laser printers [1]- [3], as well as flow cytometry [4], [5], parallel optical trapping [6], nano-bio-sensing [7] and optical probe microscopy [8]. This success is due to the devices' outstanding characteristics, such as parallel operation, low threshold current, high modulation rate and a circularly symmetric emitted beam.…”

Section: Introductionmentioning

confidence: 99%

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Bardinal

Camps

Reig

et al. 2015

IEEE J. Select. Topics Quantum Electron.

Self Cite

View full text Add to dashboard Cite

In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III-V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

show abstract

Miniaturized Scanning Near-Field Microscope Sensor Based on Optical Feedback Inside a Single-Mode Oxide-Confined Vertical-Cavity Surface-Emitting Laser

Cited by 15 publications

References 10 publications

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Collective Micro-Optics Technologies for VCSEL Photonic Integration

Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Contact Info

Product

Resources

About