New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Bargiel, Sylwester; Nieradko, Ł.; Jóźwik, Michał; Gorecki, Christophe; Dziuban, Jan

doi:10.1117/12.663770

Cited by 10 publications

(9 citation statements)

References 10 publications

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“…In this work, we present the preliminary results of implementation of a micromachined confocal microscope based on microoptical scanners and demonstrating a scheme of scanning confocal detection system based on the optical feedback in VCSELs (vertical cavity surface-emitted laser) [2][3][4]. A vertical integration scheme allows integration of cascaded microlenses, scanners, and a pinhole.…”

Section: Transducers and Eurosensors '07mentioning

confidence: 99%

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On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Gorecki

Nieradko

Bargiel

et al. 2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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We propose an original approach of a miniature scanning confocal microscope that uses two electrostatic scanners with microoptical lenses. For this chip-scale microscope, we demonstrated the use of optical feedback of VCSEL's laser as an active detection. The z-axis scanner will provide a vertical motion of the first microlens in the range of 100 µm, controlling the focal length of the objective. Raster scanning (30 µm in both directions) of a specimen by the focused illumination spot will be implemented by actuating of second microlens by x-y-axis scanner.

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Section: Transducers and Eurosensors '07mentioning

confidence: 99%

“…2 [2]. This is a millimetre-size microsystem, equipped with a microlens doublet, each microlens integrated on top of a MEMS actuator.…”

Section: Fig 2 Architecture Of Individual On-chip Confocal Microscopementioning

confidence: 99%

On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Gorecki

Nieradko

Bargiel

et al. 2007

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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“…The approach of creation of optical measurement systems of the size of measured samples, is very well illustrated by integrated confocal microscope [2]. In this system, authors integrate VCSEL as highly miniaturized lightsource and "point" detector at the same time, together with electrostatically driven x-y and z movable platforms, realized with MEMS fabrication technologies.…”

Section: Introductionmentioning

confidence: 99%

Micro-optics in advanced optical metrology

Jóźwik

2013

SPIE Proceedings

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An accurate characterization is a very important topic in a wide range of MEMS/MOEMS applications and crucial for their fabrication process. Standard characterization is performed with bulk measurement system. Usually, a high resolution optical systems measure one structure at a time and scan the measurement samples from structure to structure. These systems are not well suited to the production control of microsystems, where several thousands of structures are fabricated on the same substrate simultaneously. The paper presents new approaches using microoptics and micromachining to overcome the large ratio of wafer size to feature size in the testing step of production. The refractive and diffractive microoptical components, often fabricated on glass wafer, allow to create arrays of integrated measurement instruments. This work focuses on a new full-field optical concept for parallel, high volume M(O)EMSs' testing. The use of diffraction gratings for the realization of an array of integrated interferometers allows to create compact device with 25 measurement channels. The design of measurement platform and interferometer array, its assembly and the validation measurement results, are discussed in details. The functionality of system includes static and dynamic in-line characterization of MEMS.

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“…The microactuated optical components can be employed in many different ways to perform a fast and energy-efficient scanning, steering, or modulating the light beams, in plane and/or out of plane. For instance, microactuated microlenses can be vertically stacked to perform three-dimensional (3-D) scanning of light beam, based on transmission scanning principle [1,2]. Such miniature batch-fabricated 3-D scanner device would be a key component in the miniaturization of the conventional 3-D displays and imaging systems, widen their application fields.…”

Section: Introductionmentioning

confidence: 99%

3D micro-optical lens scanner made by multi-wafer bonding technology

et al. 2013

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We present the preliminary design, construction and technology of a microoptical, millimeter-size 3-D microlens scanner, which is a key-component for a number of optical on-chip microscopes with emphasis on the architecture of confocal microscope. The construction of the device relies on the vertical integration of micromachined building blocks: top glass lid, silicon electrostatic comb-drive X-Y and Z microactuators with integrated scanning microlenses, ceramic LTCC spacer, and bottom lid with focusing microlens. All components are connected on the wafer level only by sequential anodic bonding. The technology of through wafer vias is applied to create electrical connections through a stack of wafers. More generally, the presented bonding/connection technologies are also of a great importance for the development of various silicon-based devices based on vertical integration scheme. This approach offers a space-effective integration of complex MOEMS devices and an effect ive integration of various heterogeneous technologies

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New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Cited by 10 publications

References 10 publications

On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

On-Chip Scanning Confocal Microscope with 3D MEMS Scanner and VCSEL Feedback Detection

Micro-optics in advanced optical metrology

3D micro-optical lens scanner made by multi-wafer bonding technology

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