Advances in Polymer-Based Optical MEMS Fabrication for VCSEL Beam Shaping

Abstract

In this paper, we discuss the design, fabrication, and characterization of electrothermally actuated polymer-based microoptical electromechanical microsystems (MOEMS) for active microoptics in vertical cavity surface emitting laser (VCSEL) devices. We describe in particular the principle of a SU8-based MOEMS designed for single-mode VCSEL beam active focusing. The ultimate objective is the realization of parallel compact optical scanners for sensing applications using collective and low-cost technologies. After discussing the advantages of the epoxy resist SU-8 for fabricating an integrated movable lens on active optical devices, we present our latest advances in technology for ensuring precise MOEMS fabrication on small III-V samples and for achieving accurate alignment of lenses on suspended circular membranes. Finally, we present our first results on the beam focusing of multimode VCSELs, which demonstrate the feasibility of our approach and could provide new insights in the MEMS-VCSEL field.

Chip-scale demonstration of hybrid III–V/silicon photonic integration for an FBG interrogator

“…To obtain these circuits, the III-V materials must be transferred to the silicon waveguide chip. Adhesive bonding with organic materials, i.e., BCB [46][47][48] or SU-8 [49,50], is a simple process, which allows the construction of the hybrid silicon photonic chip for the AWG interrogator. The bonding procedure is based on the polymerization reaction of organic molecules to form long polymer chains during annealing.…”

Micro Aspheric Convex Lenses Fabricated by Precise Scraping

“…Microlenses have also developed more specific and novel applications. The microlenses are important components used in Mirau interferometers [ 10 ], scanners [ 11 , 12 ], integrated photonic platform [ 13 ], vertical-cavity surface-emitting laser beam shaping [ 14 ], telecommunications [ 15 ], data storage [ 16 ], biodetection [ 17 ], etc. Due to their important role in MOEMSs, microlenses have recently been more widely discussed.…”

Microlens Array Fabrication by Using a Microshaper

“…Moreover, recent developments show microlenses have more specific and novel applications. The micro lenses can be used in Mirau interferometers [9], imaging scanners [10], integrated photonic platform [11], vertical cavity surface emitting lasers beam shaping [12], etc. Apparently, microlenses play more important role in MOEMSs.…”