Microsensors, MEMS, and Smart Devices 2001
DOI: 10.1002/9780470846087.ch8
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Microsensors

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Cited by 21 publications
(29 citation statements)
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“…Although nowadays the learning required to be a successful professional engineer necessitates a multidisciplinary skillset [13]. Over the past decade there has been an increasing acceptance of this crossover between disciplines and degree courses such as Integrated Engineering, Mechatronics and Microelectromechanical Systems (MEMS) are now very popular in Higher Educational institutions [14].…”
Section: Background Rationalementioning
confidence: 99%
“…Although nowadays the learning required to be a successful professional engineer necessitates a multidisciplinary skillset [13]. Over the past decade there has been an increasing acceptance of this crossover between disciplines and degree courses such as Integrated Engineering, Mechatronics and Microelectromechanical Systems (MEMS) are now very popular in Higher Educational institutions [14].…”
Section: Background Rationalementioning
confidence: 99%
“…MEMS have become the state-of-the-art technology for extremely small, robust and energy efficient sensor devices. They combine mechanical elements, measuring physical quantities, with traditional integrated circuit components on a single chip [ 2 ]. Modern inertial MEMS sensors measure, among others, acceleration and rotation several thousand times per second with a high resolution.…”
Section: Introductionmentioning
confidence: 99%
“…Such an oscillator consists of a seismic mass, spring and damper. The model is described by equation (1) (where: m – seismic mass, x – seismic mass deflection, b – damping constant, k – spring constant, a – acceleration value, f – frequency of exciting force, t – time) (Gardner, 1994). If the acceleration is approximately constant the equation can be simplified to the dependence given by equation (2).…”
Section: Introductionmentioning
confidence: 99%