Three axial low temperature cofired ceramic accelerometer

Jurków, Dominik

doi:10.1108/mi-11-2012-0077

Cited by 7 publications

(4 citation statements)

References 28 publications

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“…A patented PZT film was applied to the surface of LTCC membrane as the acceleration-sensing component. Moreover, a triaxial LTCC accelerometer using piezoresistors is proposed as the follow-up [ 13 ]. An early exploration of a LTCC capacitive accelerometer was conducted in [ 14 ], which mainly focused on simulation, and a fabrication process based on sacrificial material was conceived.…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

et al. 2018

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In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure, a heavy proof mass with thin beams embedded in a large cavity, which is extremely difficult for the conventional LTCC process, is successfully completed by the optimized process. The LC resonant accelerometer, using coupling resonance frequency sensing which is first applied to LTCC accelerometer and may facilitate application in harsh environments, demonstrates a sensitivity of 375 KHz/g over the full scale range 1 g, with nonlinearity less than 6%, and the telemetry distance is 5 mm. The differential capacitive accelerometer adopting differential capacitive sensing presents a larger full scale range 10 g and lower nonlinearity less than 1%, and the sensitivity is 30.27 mV/g.

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Section: Introductionmentioning

confidence: 99%

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

et al. 2018

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“…chemical lamination (Jurkow and Golonka, 2010), expand the opportunities of the technology. Thanks to stable mechanical properties and easy 3D machining, the LTCC is applied to manufacture various kinds of accelerometers: piezoresistive (Neubert et al, 2008;Jurkow, 2013), capacitive (Gan et al, 2011) and piezoelectric (Jurkow et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

“…The external soldering pads enable assembly on a surface of printed circuit board (PCB). The improvements of presented accelerometer comparing to state of art (Neubert et al, 2008;Jurkow, 2013;Jurkow et al, 2013;Gan et al, 2011) are a better miniaturization and manufacturing of a sensor in a package in one technological process.…”

Section: Introductionmentioning

confidence: 99%

LTCC/PZT accelerometer in SMD package

Dąbrowski

Elkjær

Borregaard

et al. 2014

Microelectronics International

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Purpose -The purpose of this paper is to develop the device made of low temperature co-fired ceramics (LTCC) and lead zirconate titanate (PZT) by co-firing both materials. In the paper, the technology and properties of a miniature uniaxial ceramic accelerometer are presented. Design/methodology/approach -Finite element method (FEM) is applied to predict properties of the sensor vs main dimensions of the sensor. The LTCC process is applied during manufacturing of the device. All the advantages of the technology are taken into account during designing three-dimensional structure of the sensor. The sensitivity and resonant frequency of the accelerometer are measured. Real material parameters of PZT are estimated according to measurement results and FEM simulations. Findings -The ceramic sensor integrated with SMD package with outer dimensions of 5 ϫ 5 ϫ 5 mm 3 is manufactured. The accelerometer exhibits sensitivity of 0.75 pC/g measured at 100 Hz. The resonant frequency is equal to about 2 kHz. Useful frequency range is limited by 3 dB sensitivity change at about 1 kHz. Research limitations/implications -Sensitivity of the device is limited by interaction between LTCC and PZT materials during co-firing process.The estimated d parameters are ten times worse comparing to bulk Pz27 material. Further research on materials compatibility should be carried out. Practical implications -The sensor can be easily integrated into various devices made of standard electronic printed circuit boards (PCBs). Applied method of direct integration of piezoelectric transducers with LTCC material enables manufacturing of complex ceramic systems with built-in accelerometer in the substrate. Originality/value -The accelerometer is a sensor and a package simultaneously. The miniature ceramic device is compatible with surface mounting technology; hence, it can be used directly on PCBs for vibration monitoring inside electronic devices and systems.

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“…Many of these devices consist of thin membranes which can be utilized, e.g. as detecting components in pressure or accelerometer sensors (Jurków et al, 2013;Jurków, 2013;Zarnik et al, 2010). The thickness and flatness are extremely important properties of such membranes.…”

Section: Introductionmentioning

confidence: 99%

Influence of co-firing process condition on low temperature co-fired ceramics membrane deflection

Jurków

2014

Microelectronics International

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Purpose -The paper aims to present the influence of the co-firing process conditions of low temperature co-fired ceramics (LTCC) on the deformation of thin LTCC membranes. Design/methodology/approach -The statistical design of the experiment methodology was used in the frame of these investigations to reduce the time and costs of the experiments and to ensure easier interpretation of the obtained results. Moreover, this conception permits the rough estimation of the membrane deflection fired at optimal process conditions. Findings -The applied design of the experiment methodology allowed the researchers to find the optimal co-firing process conditions and to estimate the membrane deflection at the optimal process conditions. The estimation fits well with the results of real measurement that was conducted to confirm the estimation precision.Research limitations/implications -The experiment was conducted for only one type of LTCC, DP951. The precision of the design of the experiment optimization and estimation of the response at optimal conditions depend on the described object. Therefore, the findings of this paper do not have to be generally true for other LTCC tapes, and if other LTCC tapes deformation should be investigated, then similar analysis shall be conducted for them. Practical implications -The deformation of LTCC membranes affects the sensitivity and repeatability of LTCC acceleration and pressure sensors. Hence, the decrease of membrane deflection increases the usability of LTCC in such applications. Originality/value -This paper presents simple optimization of co-firing process conditions of LTCC devices using statistical design of the experiment.

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Three axial low temperature cofired ceramic accelerometer

Cited by 7 publications

References 28 publications

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

LTCC/PZT accelerometer in SMD package

Influence of co-firing process condition on low temperature co-fired ceramics membrane deflection

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