Microsensors, MEMS, and Smart Devices

Gardner, Julian W.; Varadan, Vijay K.; Awadelkarim, Osama O.

doi:10.1002/9780470846087

Cited by 339 publications

(225 citation statements)

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“…Previously, the main method for producing suspended structures was bulk micromachining [6], where the bulk of the Si wafer is machined from the back side of a wafer to produce the features on the surface; the most basic structure fabricated in this manner is the freestanding membrane [7]. However, micromachining from the front surface is the favoured route to incorporate MEMS alongside CMOS, where the processing consists of defining the structural boundaries of the active layer and then removing the material from under the active layer.…”

Section: Introductionmentioning

confidence: 99%

“…oxide deposition. In utilizing cheap wet etchants, active layers are mainly made upon sacrificial layers, generally dielectrics, that can be selectively removed [6] due to their high etch selectivity in wet isotropic etchants [9]. Anisotropic etchants, such as potassium hydroxide (KOH) or tetramethylammonium hydroxide (TMAH), have also been used to create suspended structures by a 'brute-force' etch against the etch-resistive {111} planes in Si(001) substrates [10,11].…”

Section: Introductionmentioning

confidence: 99%

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Electrical isolation of dislocations in Ge layers on Si(001) substrates through CMOS-compatible suspended structures

Shah

Myronov

Wongwanitwatana

et al. 2012

Science and Technology of Advanced Materials

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Suspended crystalline Ge semiconductor structures are created on a Si(001) substrate by a combination of epitaxial growth and simple patterning from the front surface using anisotropic underetching. Geometric definition of the surface Ge layer gives access to a range of crystalline planes that have different etch resistance. The structures are aligned to avoid etch-resistive planes in making the suspended regions and to take advantage of these planes to retain the underlying Si to support the structures. The technique is demonstrated by forming suspended microwires, spiderwebs and van der Pauw cross structures. We finally report on the low-temperature electrical isolation of the undoped Ge layers. This novel isolation method increases the Ge resistivity to 280 cm at 10 K, over two orders of magnitude above that of a bulk Ge on Si(001) layer, by removing material containing the underlying misfit dislocation network that otherwise provides the main source of electrical conduction.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Electrical isolation of dislocations in Ge layers on Si(001) substrates through CMOS-compatible suspended structures

Shah

Myronov

Wongwanitwatana

et al. 2012

Science and Technology of Advanced Materials

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“…R ecently, electroactive actuators that show reversible mechanical deformation in response to an electric field have received enormous interest in the era of biomimetic technology, including robotics 1 , microsensors 2 and artificial muscles 3,4 . In particular, ionic polymer actuators, which are a category of electroactive actuators, comprising a layer of polymer electrolyte sandwiched in between electrodes have emerged as promising candidates in such applications, owing to their lightweight, flexibility, mechanical robustness and ease of fabrication at low cost [5][6][7] .…”

mentioning

confidence: 99%

Fast low-voltage electroactive actuators using nanostructured polymer electrolytes

2013

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Electroactive actuators have received enormous interest for a variety of biomimetic technologies ranging from robotics and microsensors to artificial muscles. Major challenges towards practically viable actuators are the achievement of large electromechanical deformation, fast switching response, low operating voltage and durable operation. Here we report a new electroactive actuator composed of self-assembled sulphonated block copolymers and ionic liquids. The new actuator demonstrated improvements in actuation properties over other polymer actuators reported earlier, large generated strain (up to 4%) without any signs of back relaxation. In particular, the millimetre-scale displacements obtained for the actuators, with rapid response (o1 s) at sub-1-V conditions over 13,500 cycles in air, have not been previously reported in the literature. The key to success stems from the evolution of the unique hexagonal structure of the polymer layer with domain size gradients beneath the cathode during actuation, which promotes the bending motion of the actuators.

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“…Alternatively a SAW device can be defined as device consisting of thin-film metal structures fabricated on the surface of a piezoelectric substrate. 2 The purpose of the IDTs on a SAW device is to provide the electromechanical coupling between the electrical signal received (or transmitted) and the mechanical actuation of the piezoelectric substrate material. Generally these IDTs offer a simple and inexpensive means for sensing applications using SAW and integrated micro antennas.…”

Section: Saw Devicesmentioning

confidence: 99%

“…Based on the published literature, it can be noted that SAW devices are mainly used for wireless communication, sensing and interrogation applications. [1][2][3] However SAW devices also being used to develop fluid transfer microsystems such as flexural micropumps and micromachines such as ultrasonic micromotors, micromirrors etc. 4,5 The fabrication of SAW devices is also becoming easier, especially with microfabrication technologies such as photolithography and X-ray lithography in combination of other well-known processes.…”

Section: Introductionmentioning

confidence: 99%

Surface acoustic wave device based wireless passive microvalve for microfluidic applications

Dissanayake

Al-Sarawi

Abbott

2007

BioMEMS and Nanotechnology III

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There are vast advantages in the realisation of a SAW device based microvalve in Micro Electro Mechanical Systems (MEMS) and Nano Electro Mechanical Systems (NEMS) such as secure, reliable and low power operation, small size, simplicity in construction and cost effectiveness. In this paper, a Surface Acoustic Wave (SAW) based microvalve that generates micro actuations for microfluidic and similar applications is presented. The microvalve is batteryless and can be actuated wirelessly. The security of the device is enhanced by using a coded SAW correlator that is integrated as part of the microvalve. A theoretical analysis of how the actuation mechanism operates is carried out and simulation results of the new microvalve structure are discussed. The ANSYS simulation tool is used to design and simulate the micro-valve structure. Characteristics of the microvalve actuator in terms of displacement for different operating conditions are also discussed.

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Microsensors, MEMS, and Smart Devices

Cited by 339 publications

References 0 publications

Electrical isolation of dislocations in Ge layers on Si(001) substrates through CMOS-compatible suspended structures

Electrical isolation of dislocations in Ge layers on Si(001) substrates through CMOS-compatible suspended structures

Fast low-voltage electroactive actuators using nanostructured polymer electrolytes

Surface acoustic wave device based wireless passive microvalve for microfluidic applications

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