Surface acoustic wave device based wireless passive microvalve for microfluidic applications

et al. 2008

SPIE Proceedings

Self Cite

Micro-fabricated diaphragms can be used to provide pumping action in microvalve and microfluidic applications. In this paper, a design for a micro-diaphragm that features low power and small area is presented. The diaphragm is actuated using a Surface Acoustic Wave (SAW) device that is interrogated from an RF signal to provide secure actuation operation. The micropump is targeted for in vivo nano-scale drug delivery and similar applications. For low power micropump operation, it is important to design the diaphragm with a higher flexibility while maintaining the stability. Analysis is carried out using ANSYS simulation tools with different design methods and materials. Results achieved from analytical and Finite Element Modeling (FEM) methods are compared and discussed to decide on optimal dimensions for the diaphragm.

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“…1 As it was presented in authors' previous work, 1, 3 only the effect of the output IDT is considered for the FEA, instead of incorporating the whole SAW device.…”

Section: Fea and Simulation Resultsmentioning

confidence: 99%

Section: Microfluidic Devices For Drug Deliverymentioning

confidence: 99%

Design and characterisation of micro-diaphragm for low power drug delivery applications

et al. 2008

SPIE Proceedings

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“…Figure 7 shows the mid-beam and the quarterbeam displacement variation over the time (250-time-periods). Based on authors' previous work, it was shown that beam displacements up to 2 μm can be achieved using SAW device based actuation [16]. After carrying out a few different transient analysis simulations with different end times and comparing the obtained transient displacements with the static displacements achieved, it is proven even [17] after 250-time-periods still the dynamic displacement is not showing any periodic nature but in the process of gaining more displacement.…”

Section: Transient Analysismentioning

confidence: 90%

“…The electric potential at x 3 = h is zero because of the conductive plate. Using this condition, B can be eliminated from (16) and can be rewritten as…”

Section: Mechanical Boundary Conditionsmentioning

confidence: 99%

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Electrostatic Microactuator Design Using Surface Acoustic Wave Devices

Smart Sensors and Sensing Technology

Abbott

Self Cite

An integration of low power operated Surface Acoustic Wave (SAW) devices with the electrostatic microactuators for microfluidic and similar applications is presented in this chapter. Passive, low power, and small area devices can be interrogated wirelessly using SAW devices, which can respond to a uniquely coded signal for a secure and reliable operation. The novel approach relies on converting the interrogating coded signal to surface acoustic wave that is then correlated with an embedded code. A theoretical analysis of how the actuation mechanism operates is carried out and simulation results of the new microactuator are discussed. At the initial analytical stage, for simplicity, a basic SAW delay line structure is used to generate an electrostatic field between output interdigital transducer (IDT) of the SAW device and a thin conductive plate (actuator), which is placed on top of the output IDT. The static and transient displacement analysis of the actuator is carried out using ANSYS simulation tools. A comparison between the static displacements obtained from ANSYS based simulations and Rayleigh-Ritz based analysis is also presented and discussed.

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Wireless Interrogation of a Micropump and Analysis of Corrugated Micro-diaphragms

Lecture Notes in Electrical Engineering

Abbott

2009