Microgrippers created in microstructurable glass

Salim, Riad; Wurmus, Helmut; Harnisch, Alf; Hülsenberg, Dagmar

doi:10.1007/s005420050088

Cited by 23 publications

(15 citation statements)

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“…Salim et al successfully exposed and etched microgrippers a few millimeters long with features of approximately 300 lm. [94] Due to their chemical inertness, ceramics are not an ideal material for photolithography/etching processes. Makino et al etched alumina, silicon nitride, SiC, and others in phosphoric acid.…”

Section: Lithography-based Processesmentioning

confidence: 99%

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule¹,

Vuillemin

Gauckler

2003

Advanced Materials

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Processing techniques are reviewed that allow the introduction of ceramic components made from powders into microelectromechanical systems (MEMS). Ceramics have several advantages over other materials also in microsystems, e.g., heat resistance, hardness, corrosion resistivity, or functional properties. The range of available materials in microfabrication technology is being increased beyond those deposited by thin‐film technology. Top–down approaches like mechanical and laser‐based direct writing processes, ink‐jet printing, microextrusion, and lithography‐based methods are presented. They are complemented by some more fundamental work in the field of bottom–up synthesis of micro‐ and nanoscaled ceramic materials.

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Section: Lithography-based Processesmentioning

confidence: 99%

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Heule¹,

Vuillemin

Gauckler

2003

Advanced Materials

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“…These are, namely, novel microfabrication techniques, [5][6][7][8][9] new actuation methodologies, 7,10-14 and manipulation of different materials. [15][16][17][18] The development of novel actuation methods to drive the microdevices predominantly improved the manipulation accuracy and further paves the way for downscaling the mod-els. The actuator can either stand as part of the unit 7,11,13,15 or split configuration 6,8,[18][19][20] is adopted, thus enabling the developer to have more alternatives during developing stage.…”

Section: Development Of Novel Hybrid Flexure-based Microgrippers For mentioning

confidence: 99%

“…[15][16][17][18] The development of novel actuation methods to drive the microdevices predominantly improved the manipulation accuracy and further paves the way for downscaling the mod-els. The actuator can either stand as part of the unit 7,11,13,15 or split configuration 6,8,[18][19][20] is adopted, thus enabling the developer to have more alternatives during developing stage. Some microgrippers also incorporate sensory based architecture for providing feedback signal to enhance the accuracy and precision in microhandling operations.…”

Section: Development Of Novel Hybrid Flexure-based Microgrippers For mentioning

confidence: 99%

“…[25][26][27][28][29] A variety of microgrippers were developed, as reported by Refs. 5,8,18,20, and 30, incorporating a piezoactuator to drive the mechanism. Both silicon and nonsilicon fabrication techniques were successfully employed to establish the monolithic structure of the microgrippers.…”

Section: Development Of Novel Hybrid Flexure-based Microgrippers For mentioning

confidence: 99%

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Development of novel hybrid flexure-based microgrippers for precision micro-object manipulation

Zubir

Shirinzadeh

Tian

2009

Review of Scientific Instruments

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This paper describes the process of developing a microgripper that is capable of high precision and fidelity manipulation of micro-objects. The design adopts the concept of flexure-based hinges on its joints to provide the rotational motion, thus eliminating the inherent nonlinearities associated with the application of conventional rigid hinges. A combination of two modeling techniques, namely, pseudorigid body model and finite element analysis was utilized to expedite the prototyping procedure, which leads to the establishment of a high performance mechanism. A new hybrid compliant structure integrating cantilever beam and flexural hinge configurations within microgripper mechanism mainframe has been developed. This concept provides a novel approach to harness the advantages within each individual configuration while mutually compensating the limitations inherent between them. A wire electrodischarge machining technique was utilized to fabricate the gripper out of high grade aluminum alloy (Al 7075T6). Experimental studies were conducted on the model to obtain various correlations governing the gripper performance as well as for model verification. The experimental results demonstrate high level of compliance in comparison to the computational results. A high amplification characteristic and maximum achievable stroke of 100 microm can be achieved.

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“…Examples include the analysis of airborne particles and pathogens. Microgrippers can be used to manipulate such particles in liquid [1], capture cells in suspension [2] and characterize mechanical properties of individual biological particles [3], and are usually designed to grip particles by frictional forces [1,[4][5][6] . However, these contact-based approaches can cause damage due to the mechanical forces involved [3]; they can also encounter problems with stiction, due to significant adhesive (capillary) forces that can be present at such small scales [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Optimisation of an acoustic resonator for particle manipulation in air

Devendran

Billson

Hutchins

et al. 2016

Sensors and Actuators B: Chemical

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(2015) Optimisation of an acoustic resonator for particle manipulation in air. Sensors and Actuators B: Chemical, 224 . pp. 529-538. Permanent WRAP URL:http://wrap.warwick.ac.uk/83726 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. AbstractAn acoustic resonator system has been investigated for the manipulation and entrapment of micronsized particles in air. Careful consideration of the effect of the thickness and properties of the materials used in the design of the resonator was needed to ensure an optimised resonator. This was achieved using both analytical and finite-element modelling, as well as predictions of acoustic attenuation in air as a function of frequency over the 0.8 to 2.0 MHz frequency range. This resulted in a prediction of the likely operational frequency range to obtain particle manipulation. Experimental results are presented to demonstrate good capture of particles as small as 15 µm in diameter.

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Microgrippers created in microstructurable glass

Cited by 23 publications

References 0 publications

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Powder‐Based Ceramic Meso‐ and Microscale Fabrication Processes

Development of novel hybrid flexure-based microgrippers for precision micro-object manipulation

Optimisation of an acoustic resonator for particle manipulation in air

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